Dr. Xiansong Xiang Profile

Dr. Xiansong Xiang

at Shanghai Institute of Optics and Fine Mechanics

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Author

Publications (7)

Proceedings Article | 8 November 2018 Paper

Orthogonal crossed gratings fabricated by scanning Dammann lithography

Minkang Li, Changhe Zhou, Chunlong Wei, Wei Jia, Xiansong Xiang, Shiyao Zhu, Fantao Bu, Yunkai Lu

Proceedings Volume 10818, 108180V (2018) https://doi.org/10.1117/12.2500281

KEYWORDS: Lithography, Interferometers, Photoresist materials, Optical encoders, Diffraction gratings, Mirrors, Atomic force microscopy, Laser applications, Photomasks, Lutetium

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Proceedings Article | 6 November 2018 Paper

Gratings theory for pico-optics applications

Changhe Zhou, Minkang Li, Xiansong Xiang, Chunlong Wei, Wei Jia, Changcheng Xiang

Proceedings Volume 10818, 108180G (2018) https://doi.org/10.1117/12.2500319

KEYWORDS: Interferometers, Wavefronts, Holography, Diffraction gratings, Sensors, Distortion, Optical components, Nano optics, Distance measurement, Diffraction

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Proceedings Article | 31 October 2016 Paper

Study of a grating interferometer with high optical subdivision technique

Yancong Lu, Changhe Zhou, Shubin Li, Chunlong Wei, Minkang Li, Xiansong Xiang, Jili Deng, Changcheng Xiang, Wei Jia, Junjie Yu, Jin Wang, Chao Li

Proceedings Volume 10022, 1002214 (2016) https://doi.org/10.1117/12.2246091

KEYWORDS: Interferometers, Diffraction gratings, Prisms, Environmental sensing, Mirrors, Geometrical optics, Signal processing, Interferometry, Light sources, Beam splitters

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Proceedings Article | 31 October 2016 Paper

Interference pattern period measurement at picometer level

Xiansong Xiang, Chunlong Wei, Wei Jia, Changhe Zhou, Minkang Li, Yancong Lu

Proceedings Volume 10022, 100220Z (2016) https://doi.org/10.1117/12.2245946

KEYWORDS: Data analysis, Error analysis, Lithography, Interferometers, Electronic filtering, Beam splitters, Sensors, Signal detection, Mirrors, Signal processing

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Proceedings Article | 31 October 2016 Paper

Image grating metrology using phase-stepping interferometry in scanning beam interference lithography

Minkang Li, Changhe Zhou, Chunlong Wei, Wei Jia, Yancong Lu, Changcheng Xiang, XianSong Xiang

Proceedings Volume 10022, 1002212 (2016) https://doi.org/10.1117/12.2245330

KEYWORDS: Phase interferometry, Image fusion, Interferometry, Lithography, Interferometers, Metrology, Wavefronts, Phase shifts, Phase shifting, Distortion

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Proceedings Article | 11 November 2014 Paper

Pitch evaluation of high-precision gratings

Yancong Lu, Changhe Zhou, Chunlong Wei, Wei Jia, Xiansong Xiang, Yanyang Li, Junjie Yu, Shubin Li, Jin Wang, Kun Liu, Shengbin Wei

Proceedings Volume 9271, 92711G (2014) https://doi.org/10.1117/12.2071260

KEYWORDS: Digital image correlation, Charge-coupled devices, Optical encoders, Speckle, Computer programming, CCD image sensors, Interferometers, Image analysis, Laser optics, Laser metrology

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Proceedings Article | 11 November 2014 Paper

Single-track absolute position encoding method based on spatial frequency of stripes

Xiansong Xiang, Yancong Lu, Chunlong Wei, Changhe Zhou

Proceedings Volume 9271, 92711I (2014) https://doi.org/10.1117/12.2071456

KEYWORDS: Computer programming, Head, Spatial frequencies, Charge-coupled devices, CCD image sensors, Binary data, Microscopes, Photodiodes, Manufacturing, Image processing

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Showing 5 of 7 publications

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