Dr. Xiaojun Luo Profile

Dr. Xiaojun Luo

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Publications (2)

Proceedings Article | 10 April 2024 Presentation + Paper

A novel flow of full-chip OPC model calibration and verification by utilizing SEM image contours

Yuan Gan, Changlian Yan, Mengqing Yu, Penghui Zhu, Jing Qiao, Lile Lu, Shengrui Zhang, Ming Ding, Chunying Han, Weijie Shi, Xiaojun Luo, Junhai Jiang, Zongchang Yu

Proceedings Volume 12954, 129540K (2024) https://doi.org/10.1117/12.3010034

KEYWORDS: Optical proximity correction, Calibration, Contour modeling, Scanning electron microscopy, Data modeling, Data acquisition, Contour extraction, Image quality, Critical dimension metrology, Process modeling

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Proceedings Article | 10 April 2024 Poster + Paper

Innovative wafer defect inspection mode: self-adaptive pattern to pattern inspection

Changlian Yan, Jing Qiao, Yuan Gan, Nuo Ding, Zhao Chen, Ming Ding, Xiaojun Luo, Junhai Jiang, Zongchang Yu, ChunYing Han

Proceedings Volume 12955, 129552E (2024) https://doi.org/10.1117/12.3010013

KEYWORDS: Inspection, Design, Defect detection, Defect inspection, Scanning electron microscopy, Manufacturing

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