CONFERENCE PROCEEDINGS
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Dr. Xinxin Li
at SIMIT
SPIE Involvement:
Author
Publications (4)
SPIE Journal Paper | 11 February 2013
Measurement of the gauge factor of few-layer graphene
Xiaohu Zheng, Xing Chen, Ji-Kwan Kim, Dong-Weon Lee, Xinxin Li
JM3, Vol. 12, Issue 01, 013009, (February 2013) https://doi.org/10.1117/12.10.1117/1.JMM.12.1.013009
KEYWORDS: Graphene, Resistance, Temperature metrology, Carbon, Electrodes, Metals, Environmental sensing, Silicon, Semiconducting wafers, Sensors
Proceedings Article | 15 August 2000 Paper
Deep cavity-shaped diaphragm for enhancement of microphone mechanical sensitivity
Xinxin Li, Rongming Lin, Huatsoon Kek
Proceedings Volume 4176, (2000) https://doi.org/10.1117/12.395641
KEYWORDS: Finite element methods, Thin films, Silicon films, Silicon, Samarium, Modal analysis, Mechanical engineering, Deposition processes, Acoustics, Etching
Proceedings Article | 30 August 1999 Paper
Which etchant used and whether an etching mask exists: how they make differences on convex-corner undercutting configuration and compensation criteria
Xinxin Li, Rongming Lin, Jianmin Miao, Minhang Bao
Proceedings Volume 3874, (1999) https://doi.org/10.1117/12.361213
KEYWORDS: Etching, Anisotropic etching, Silicon, Scanning electron microscopy, 3D modeling, Chlorine, Lithium, Bulk micromachining, Sensors, Crystals
Proceedings Article | 31 August 1998 Paper
Composite cantilever beam-mass structure gyroscope by a novel etching technology
Xinxin Li, Minhang Bao, Heng Yang, Shaoqun Shen, Weiyuan Wang
Proceedings Volume 3511, (1998) https://doi.org/10.1117/12.324321
KEYWORDS: Etching, Composites, Gyroscopes, Semiconducting wafers, Bridges, Anisotropic etching, Sensors, Photomasks, Resistors, Atmospheric sensing
Proceedings Volume Editor (2)
Conference Committee Involvement (12)
Nano-, Bio-, Info-Tech Sensors and 3D Systems
26 March 2017 | Portland, Oregon, United States
Nano-, Bio-, Info-Tech Sensors and Systems
21 March 2016 | Las Vegas, Nevada, United States
Nano-, Bio-, Info-Tech Sensors and Systems
9 March 2015 | San Diego, California, United States
Nano-, Bio-, Info-Tech Sensors and Systems
10 March 2014 | San Diego, California, United States
Nano-, Bio-, Info-Tech Sensors and Systems
10 March 2013 | San Diego, California, United States
Showing 5 of 12 Conference Committees
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