Yasuki Takeuchi
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 27 April 2023 Presentation + Paper
Proceedings Volume 12496, 124960M (2023) https://doi.org/10.1117/12.2657438
KEYWORDS: Semiconducting wafers, Education and training, Data modeling, High volume manufacturing, Overlay metrology, Machine learning, 3D modeling, Metrology, Performance modeling, Object detection

Proceedings Article | 22 February 2021 Presentation + Paper
Proceedings Volume 11611, 116110E (2021) https://doi.org/10.1117/12.2590247

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top