Dr. Ye Ri Han
at DuPont
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 9 April 2024 Presentation + Paper
Jayoung Koo, YunJi Kim, You Rim Shin, HyunHo Yoon, Philjae Kang, Ye Ri Han, Jong Keun Park, Karen Petrillo, Jae Hwan Sim
Proceedings Volume 12957, 129571C (2024) https://doi.org/10.1117/12.3010977
KEYWORDS: Photoacid generators, Electrons, Extreme ultraviolet, Lithography, Extreme ultraviolet lithography, Photoresist materials, Mathematical optimization, Light absorption, Materials properties, Chemical species

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