Mr. Ying-Tung Chen Profile

Ying-Tung Chen

PhD Candidate at National Taiwan Univ

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Publications (1)

Proceedings Article | 22 January 2005 Paper

Surface morphology and subsurface damaged layer of various glasses machined by 193-nm ArF excimer laser

Yunn-shiuan Liao, Ying-Tung Chen, Choung-Lii Chao, Yih-Ming Liu

Proceedings Volume 5715, (2005) https://doi.org/10.1117/12.592034

KEYWORDS: Glasses, Excimer lasers, Laser ablation, Laser processing, Micromachining, Ultraviolet radiation, Zerodur, Pulsed laser operation, Polymers, Laser scattering

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