Yong-Tong Zou
at Industrial Technology Research Institute
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 10 October 2013 Paper
C.-H. Chan, Y.-T. Zou, C.-T. Chen, T.-K. Liu, C.-H. Chen, H.-W. Wang, S.-C. Lin
Proceedings Volume 8916, 89161N (2013) https://doi.org/10.1117/12.2035682
KEYWORDS: Inspection, Oxides, Indium, Tin, System identification, Liquid crystals, Translucency, Positron emission tomography, Sensing systems, Polymer thin films

Proceedings Article | 21 September 2007 Paper
Proceedings Volume 6672, 66720S (2007) https://doi.org/10.1117/12.731429
KEYWORDS: Phase shifts, Beam splitters, Phase interferometry, Interferometry, Interferometers, Error analysis, Profiling, Diffraction, Reliability, 3D metrology

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