Mr. Yoshihiko Sato Profile

Yoshihiko Sato

at Ushio Inc

SPIE Involvement:

Author

Publications (9)

Proceedings Article | 13 November 2024 Poster

LDP EUV source performance and cost-of-ownership improvement

Yusuke Teramoto, Shunichi Morimoto, Teruaki Kawajiri, Koji Suzuki, Fuki Sato, Akihisa Nagano, Noritaka Ashizawa, Hidenori Watanabe, Kazuya Aoki, Yoshihiko Sato

Proceedings Volume PC13215, PC1321514 (2024) https://doi.org/10.1117/12.3036726

KEYWORDS: Extreme ultraviolet, Tunable filters, Plasma, Inspection, Extreme ultraviolet lithography, Tin, Reliability, Pulsed laser operation, Ions, EUV optics

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Proceedings Article | 21 November 2023 Paper

High-brightness LDP source

Masataka Mamizuka, Teruaki Kawajiri, Koji Suzuki, Yusuke Teramoto, Takahiro Shirai, Shunichi Morimoto, Hidenori Watanabe, Akihisa Nagano, Daisuke Yajima, Noritaka Ashizawa, Kazuya Aoki, Yoshihiko Sato

Proceedings Volume 12750, 1275012 (2023) https://doi.org/10.1117/12.2687785

KEYWORDS: Plasma, Extreme ultraviolet, Extreme ultraviolet lithography, Tin, Reliability, Light sources, Electrodes

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Proceedings Article | 29 September 2023 Paper

High-brightness LDP source

Kazuya Aoki, Yoshihiko Sato, Yusuke Teramoto, Takahiro Shirai, Shunichi Morimoto, Hidenori Watanabe, Akihisa Nagano, Daisuke Yajima, Noritaka Ashizawa

Proceedings Volume 12915, 1291509 (2023) https://doi.org/10.1117/12.2688117

KEYWORDS: Extreme ultraviolet, Plasma, Tin, Extreme ultraviolet lithography, Inspection, Reliability, Plasma generation, Semiconductors, Light sources, Ions

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Proceedings Article | 26 May 2023 Presentation + Paper

Improvement of LDP EUV source performance for actinic patterned mask inspection

Safak Sayan, Kishore Chakravorty, Yusuke Teramoto, Bárbara Santos, Akihisa Nagano, Noritaka Ashizawa, Takahiro Shirai, Shunichi Morimoto, Hidenori Watanabe, Kazuya Aoki, Yoshihiko Sato

Proceedings Volume PC12494, PC124940E (2023) https://doi.org/10.1117/12.2671128

KEYWORDS: Extreme ultraviolet, Plasma, Tin, Inspection, Electrodes, Laser irradiation, Vacuum chambers, Reliability, Ions, Pulsed laser operation

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Proceedings Article | 1 December 2022 Presentation + Paper

High-brightness LDP source for EUVL mask inspection

Ryuta Furuya, Kazuya Aoki, Yusuke Teramoto, Takahiro Shirai, Shunichi Morimoto, Hirdenori Watanabe, Akihisa Nagano, Daisuke Yajima, Noritaka Ashizawa, Yoshihiko Sato

Proceedings Volume 12292, 122920G (2022) https://doi.org/10.1117/12.2641777

KEYWORDS: Plasma, Extreme ultraviolet, Electrodes, Inspection, Photomasks, Light sources, Extreme ultraviolet lithography, Ions, Cameras, Laser irradiation

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Proceedings Article | 16 September 2022 Paper

High-brightness LDP source for EUVL mask inspection

Kazuya Aoki, Yoshihiko Sato, Yusuke Teramoto, Takahiro Shirai, Shunichi Morimoto, Hidenori Watanabe, Akihisa Nagano, Daisuke Yajima, Noritaka Ashizawa

Proceedings Volume 12325, 123250I (2022) https://doi.org/10.1117/12.2642210

KEYWORDS: Extreme ultraviolet, Plasma, Inspection, Extreme ultraviolet lithography, Photomasks, Ions, Tin, Reliability, Plasma generation, Light sources

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Proceedings Article | 30 September 2021 Presentation

High-brightness LDP EUV source for EUV mask inspection

Noritaka Ashizawa, Yoshihiko Sato, Hidenori Watanabe, Yusuke Teramoto, Takahiro Shirai, Shunichi Morimoto, Hironobu Yabuya, Kazuya Aoki, Daisuke Yajima, Akihisa Nagano

Proceedings Volume 11854, 118540L (2021) https://doi.org/10.1117/12.2600974

KEYWORDS: Extreme ultraviolet, Inspection, Plasma, Reliability, Tin, Light sources, Laser development, Extreme ultraviolet lithography, Electrodes

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Proceedings Article | 23 August 2021 Paper

High-brightness LDP source for EUVL mask inspection

Kazuya Aoki, Yoshihiko Sato, Yusuke Teramoto, Takahiro Shirai, Shunichi Morimoto, Hidenori Watanabe

Proceedings Volume 11908, 119080I (2021) https://doi.org/10.1117/12.2601995

KEYWORDS: Extreme ultraviolet, Plasma, Tin, Inspection, Light sources, Photomasks, Extreme ultraviolet lithography, Semiconductors, Reliability

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Proceedings Article | 23 March 2021 Presentation + Paper

Laser-assisted discharge produced plasma (LDP) EUV source for actinic patterned mask inspection (APMI)

Safak Sayan, Kishore Chakravorty, Yusuke Teramoto, Takahiro Shirai, Shunichi Morimoto, Hidenori Watanabe, Yoshihiko Sato, Kazuya Aoki, Ted Liang, Yoshihiro Tezuka, Marieke Jager, Firoz Ghadiali, Frank Abboud, Steven Carson

Proceedings Volume 11609, 116090L (2021) https://doi.org/10.1117/12.2588788

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Showing 5 of 9 publications

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