This study optimizes the distribution function of laser light intensity inside the material, based on the interaction between a femtosecond laser of 800 nm wavelength and quartz crystal, comprehensively considering the changes in absorption coefficient and reflectivity caused by material anisotropy. Throughout the simulation of multi-pulse machining, the influence of processing parameters such as the number of pulses and pulse energy on the hole depth, hole taper, and cross-sectional topography was investigated. Finally, the three-dimensional topography processed at various scanning rates was researched, and the correlation between the spot overlap ratio and the bottom surface topography was examined.
Quartz tuning fork is a kind of widely used piezoelectric device. However, as a hard and brittle material, silicon dioxide crystal, which is the core component of tuning fork, is difficult to realize high precision microprocessing. In this paper, femtosecond laser is used to process silicon dioxide crystal. The laser processing parameters which affect quality of tuning fork sidewall are theoretically analyzed, and an experimental study is carried out to optimize the technological parameters and improve the quality of tuning fork crystal. In addition, a set of processing route of quartz tuning device is designed, The tuning fork sensor manufactured has the characteristics of low cost, compact structure, low power consumption and will have a wide application prospects in the future.
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