We describe an immersion grating (IG) with both low polarization-dependent loss (PDL) and high diffraction efficiency.
Our immersion grating consists of a silicon (Si) prism and a Si grating coated with dielectric film. We analyze the effect
of the refractive index of dielectric film and clarify the refractive index ratio between a Si grating and dielectric film.
Selecting an adequate material for the dielectric film, we design the diffraction efficiency of TM polarization without
changing that of TE polarization. The simulation results for the optimized IG show a PDL of 0.2 dB and diffraction
efficiency of -0.4 dB. A prototype with high dispersion power provides a low PDL of 0.6 dB, while maintaining a high
diffraction efficiency of -0.4 dB.
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