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Yujiao Li
at ITMO Univ.
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Publications (1)
Proceedings Article | 4 November 2024 Poster
Simulation and analysis of multilayer film for EUV lithography
Haoyu Wang, Shan Gao, Yujiao Li, Lyudmila Gubanova, Elena Tsyganok
Proceedings Volume 13237, (2024) https://doi.org/10.1117/12.3036153
KEYWORDS: Multilayers, Extreme ultraviolet lithography, Reflection, Reflectivity, Light sources, Analytical research, Mathematical modeling, Light sources and illumination, Film thickness, EUV optics
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