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Zhengrui Tu
at Ctr de Nanosciences et de Nanotechnologies
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Publications (1)
Proceedings Article | 5 March 2021 Presentation
Ultra-high on-chip optical gain fabricated with atomic-layer deposition technology
John-Olof Rönn, Weiwei Zhang, Zhengrui Tu, Jianhao Zhang, Eric Cassan, Zhipei Sun
Proceedings Volume 11689, 116890R (2021) https://doi.org/10.1117/12.2577167
KEYWORDS: Silicon, Waveguides, Planar waveguides, Optical amplifiers, Light sources, Deposition processes
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