Dr. Haiyang Quan Profile

Dr. Haiyang Quan

at Institute of Optics And Electronics CAS

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Author

Publications (9)

Proceedings Article | 20 December 2023 Poster + Paper

A smartphone-based device for automatically calibrating wave-front systematical error

Jianyao Luo, Jianke Li, Haiyang Quan, Jian Wang, Song Hu

Proceedings Volume 12769, 127691H (2023) https://doi.org/10.1117/12.2688938

KEYWORDS: Wavefront errors, Calibration, Spherical lenses, Wavefronts, Interferometers, Error analysis, Design, Control systems, Wavefront aberrations, Light sources

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Proceedings Article | 4 April 2023 Paper

Source optimization using hybrid genetic algorithm in lithography

Haifeng Sun, Qingyan Zhang, Chuan Jin, Haiyang Quan, Jian Wang, Song Hu, Junbo Liu

Proceedings Volume 12617, 126176M (2023) https://doi.org/10.1117/12.2666722

KEYWORDS: Lithography, Mathematical optimization, Matrices, Lithographic illumination, Genetic algorithms, Particle swarm optimization, Image processing, Source mask optimization, Coherence imaging, Technology

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Proceedings Article | 9 January 2023 Paper

Absolute wavefront measurement of lithography projection lens using random averaging method

Qinglan Wang, Jianke Li, Haiyang Quan, Junbo Liu, Chuan Jin, Song Hu

Proceedings Volume 12507, 125072F (2023) https://doi.org/10.1117/12.2656462

KEYWORDS: Calibration, Spherical lenses, Wavefronts, Monochromatic aberrations, Optical spheres, Zemax, Measurement devices, Interferometers, Lithography, Glasses

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Proceedings Article | 18 November 2019 Paper

Experimental study on defect detection method for spherical surface

ChengRui Li, Xi Hou, XiaoSong Du, HaiYang Quan, XiaoChuan Hu

Proceedings Volume 11189, 1118911 (2019) https://doi.org/10.1117/12.2538863

KEYWORDS: Defect detection, Optical components, Spherical lenses, Imaging systems, Light sources, Light scattering, Light scattering, Light emitting diodes, Light emitting diodes, Scattering, Scattering, Interferometers, Interferometers, Visibility, Visibility

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Proceedings Article | 26 April 2019 Presentation + Paper

Absolute interferometric testing of an ultra-precise flat substrate with a liquid mirror

Haiyang Quan, Xi Hou, Gaofeng Wu, Xiaochuan Hu

Proceedings Volume 11032, 110320J (2019) https://doi.org/10.1117/12.2520894

KEYWORDS: Interferometry, X-rays, Optical testing, X-ray optics, Optical fabrication

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Proceedings Article | 27 September 2016 Paper

Evaluating surface repeatability for interferometric measurement: a comparative study

Haiyang Quan, Hou Xi, Fan Wu

Proceedings Volume 9684, 96842M (2016) https://doi.org/10.1117/12.2243301

KEYWORDS: Interferometry, Computer simulations, Calibration, Photovoltaics, Monochromatic aberrations, Interferometers, Statistical analysis, Wavefronts, Optical spheres, Optical testing

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Proceedings Article | 27 September 2016 Paper

Large-scale absolute surface reconstruction

Gao-feng Wu, Hai-yang Quan, Wei-hong Song, Yong-qian Wu, Fan Wu

Proceedings Volume 9684, 96843L (2016) https://doi.org/10.1117/12.2243603

KEYWORDS: Optimization (mathematics), Reconstruction algorithms, Iterative methods, Process modeling, Inverse problems, Optical testing, Pixel resolution, Data modeling, Inverse optics, Spatial resolution

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Proceedings Article | 8 October 2015 Paper

Modeling Fizeau interferometer based on ray tracing with Zemax

Yiwei He, Xi Hou, Yongqian Wu, Fan Wu, Haiyang Quan, Fengwei Liu

Proceedings Volume 9677, 96770G (2015) https://doi.org/10.1117/12.2197612

KEYWORDS: Interferometers, Error analysis, Photovoltaics, Zemax, Imaging systems, Fizeau interferometers, Wavefronts, Sensors, Ray tracing, Optical testing

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Proceedings Article | 8 October 2015 Paper

Iterative algorithm for reconstructing rotationally asymmetric surface deviation with pixel-level spatial resolution

Haiyang Quan, Fan Wu, Xi Hou

Proceedings Volume 9677, 96771M (2015) https://doi.org/10.1117/12.2199700

KEYWORDS: Spatial resolution, Reconstruction algorithms, Optical testing, Iterative methods, Metrology, Interferometry, Matrices, Direct methods, Fluctuations and noise, Electronics

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Showing 5 of 9 publications

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