Study of high power laser mirror shape maintenance technology

Gang Li; Feng Wang; Shunfu Liu; Songwen Deng; Tianxiang Sun; Yushi Liu; Zengbao Zhang; Long Sun; Yuqi Jin

doi:10.1117/12.2065388

3 February 2015 Study of high power laser mirror shape maintenance technology

Gang Li, Feng Wang, Shunfu Liu, Songwen Deng, Tianxiang Sun, Yushi Liu, Zengbao Zhang, Long Sun, Yuqi Jin

Proceedings Volume 9255, XX International Symposium on High-Power Laser Systems and Applications 2014; 92553Y (2015) https://doi.org/10.1117/12.2065388
Event: XX International Symposium on High Power Laser Systems and Applications, 2014, Chengdu, China

Abstract

With the laser power and operation time increasing, the surface distortion of the laser cavity mirrors has been a critical problem to be resolved. In order to maintain the mirror shape under intense laser irradiation, in this paper, a new type of micro channel silicon water cooled mirror is given. The water cooled mirror includes three layers, the first layer is mirror seat made of Invar materials with water inlet and outlet, the second layer is water manifold unit made of silicon with millimeter channels; the third layer is reflection plate with micro-channels. These three layers are bonded together by vacuum soldering. Then the thickness of the reflection plate is reduced to 0.5mm by grinding, and polished by traditional pitch polishing method. In order to reduce the coating stress, conventional all dielectric coating is replaced by a metal dielectric film stack. At last, a 100mm×100mm water cooled mirror is fabricated with surface figure 0.22λ@632.8 nm. The mirror surface distortion is 0.12λ、0.24λ、0.33 λ respectively corresponding to 7.3w/cm² 、11.9 w/cm² 、17.6 w/cm² heat load.

Citation Download Citation

Gang Li, Feng Wang, Shunfu Liu, Songwen Deng, Tianxiang Sun, Yushi Liu, Zengbao Zhang, Long Sun, and Yuqi Jin "Study of high power laser mirror shape maintenance technology", Proc. SPIE 9255, XX International Symposium on High-Power Laser Systems and Applications 2014, 92553Y (3 February 2015); https://doi.org/10.1117/12.2065388

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