PROCEEDINGS VOLUME 4180
MICROMACHINING AND MICROFABRICATION | 18-21 SEPTEMBER 2000
MEMS Reliability for Critical Applications
Editor(s): Russell A. Lawton
Editor Affiliations +
IN THIS VOLUME

4 Sessions, 16 Papers, 0 Presentations, 0 Posters
MICROMACHINING AND MICROFABRICATION
18-21 September 2000
Santa Clara, CA, United States
MEMS Failure Analysis
Jeremy A. Walraven, Jerry M. Soden, Danelle M. Tanner, Paiboon Tangyunyong, Edward I. Cole Jr., Richard E. Anderson, Lloyd W. Irwin
Proceedings Volume MEMS Reliability for Critical Applications, (2000) https://doi.org/10.1117/12.395703
Proceedings Volume MEMS Reliability for Critical Applications, (2000) https://doi.org/10.1117/12.395707
Jeremy A. Walraven, Seethambal S. Mani, James G. Fleming, Thomas J. Headley, Paul G. Kotula, Alejandro A. Pimentel, Michael J. Rye, Danelle M. Tanner, Norman F. Smith
Proceedings Volume MEMS Reliability for Critical Applications, (2000) https://doi.org/10.1117/12.395708
MEMS Process and Packaging Reliability
Ville Kaajakari, Shyi-Herng Kan, Li-Jen Lin, Amit Lal, M. Steven Rodgers
Proceedings Volume MEMS Reliability for Critical Applications, (2000) https://doi.org/10.1117/12.395709
Jeffrey M. Jennings, Leslie M. Phinney
Proceedings Volume MEMS Reliability for Critical Applications, (2000) https://doi.org/10.1117/12.395710
Stephen E. Vargo, Amanda A. Green, Juergen Mueller, David P. Bame, Robert H. Reinicke
Proceedings Volume MEMS Reliability for Critical Applications, (2000) https://doi.org/10.1117/12.395711
Surface Micromachined MEMS Reliability
Proceedings Volume MEMS Reliability for Critical Applications, (2000) https://doi.org/10.1117/12.395696
Carolyn D. White, Herbert R. Shea, Kimberly K. Cameron, Flavio Pardo, Cristian A. Bolle, Vladimir A. Aksyuk, Susanne Arney
Proceedings Volume MEMS Reliability for Critical Applications, (2000) https://doi.org/10.1117/12.395697
Russell A. Lawton, Gisela Lin, Joanne Wellman, Leslie M. Phinney, Jose Uribe, Edward Griffith, Ingrid De Wolf, Eric Lawrence
Proceedings Volume MEMS Reliability for Critical Applications, (2000) https://doi.org/10.1117/12.395698
MEMS Qualification
Kevin M. Frederick, Gary K. Fedder
Proceedings Volume MEMS Reliability for Critical Applications, (2000) https://doi.org/10.1117/12.395699
Herbert R. Shea, Arman Gasparyan, Carolyn D. White, Robert B. Comizzoli, David Abusch-Magder, Susanne Arney
Proceedings Volume MEMS Reliability for Critical Applications, (2000) https://doi.org/10.1117/12.395700
Chad B. O'Neal, Ajay P. Malshe, William P. Eaton
Proceedings Volume MEMS Reliability for Critical Applications, (2000) https://doi.org/10.1117/12.395701
Se-Ho Lee, Jae Sug Kim, Y. Eugene Pak, Jong up Jeon, Dongil Kwon
Proceedings Volume MEMS Reliability for Critical Applications, (2000) https://doi.org/10.1117/12.395702
MEMS Failure Analysis
David J. Bishop, Vladimir A. Aksyuk, Cristian A. Bolle, C. Randy Giles, Flavio Pardo, Jim A. Walker
Proceedings Volume MEMS Reliability for Critical Applications, (2000) https://doi.org/10.1117/12.395704
Proceedings Volume MEMS Reliability for Critical Applications, (2000) https://doi.org/10.1117/12.395705
Laurent Dellmann, Terunobu Akiyama, Danick Briand, Sebastien Gautsch, Olivier T. Guenat, Benedikt Guldimann, Philippe Luginbuhl, Cornel Marxer, Urs Staufer, et al.
Proceedings Volume MEMS Reliability for Critical Applications, (2000) https://doi.org/10.1117/12.395706
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