Characterization of optical materials using Auger electron spectroscopy

Mark R. Davidson; Paul H. Holloway

doi:10.1117/12.279842

30 July 1997 Characterization of optical materials using Auger electron spectroscopy

Mark R. Davidson, Paul H. Holloway

Proceedings Volume 10291, Materials Characterization and Optical Probe Techniques: A Critical Review; 102910E (1997) https://doi.org/10.1117/12.279842
Event: Optical Science, Engineering and Instrumentation '97, 1997, San Diego, CA, United States

Abstract

Auger electron spectroscopy is one of the most commonly used techniques for surface analysis. It has evolved from its first common use for solid surfaces in the late 1960s to become a tool for routine analysis of materials. This article provides a concise review of the use of Auger electron spectroscopy, with emphasis on its use for optical materials. The fundamentals of the technique are reviewed, along with a discussion of data analysis and the equipment commonly used to perform the technique. Several examples of the use of AES for optical materials are discussed.

Citation Download Citation

Mark R. Davidson and Paul H. Holloway "Characterization of optical materials using Auger electron spectroscopy", Proc. SPIE 10291, Materials Characterization and Optical Probe Techniques: A Critical Review, 102910E (30 July 1997); https://doi.org/10.1117/12.279842

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available