Usefulness of orthogonal basis sets for predicting optical performance of wavefronts with mid-spatial frequency error

Zahra Hosseinimakarem; Angela D. Davies; Chris J. Evans

doi:10.1117/12.2275831

23 August 2017 Usefulness of orthogonal basis sets for predicting optical performance of wavefronts with mid-spatial frequency error

Zahra Hosseinimakarem, Angela D. Davies, Chris J. Evans

Author Affiliations +

Proceedings Volume 10373, Applied Optical Metrology II; 1037302 (2017) https://doi.org/10.1117/12.2275831
Event: SPIE Optical Engineering + Applications, 2017, San Diego, California, United States

Abstract

Mid-spatial frequency (MSF) texture on optical elements degrade their performance. A Zernike polynomial representation of the wavefront can be used to characterize the mid-spatial frequency and predict the optical performance. The ability to generate very large orders of Zernike polynomials enables fitting and describing optical wavefronts all the way from low order form errors to mid-spatial frequencies. Based on a filtering aspect of Zernike polynomials, we show how different fabrication signatures affect optical performance differently. We investigate the Strehl ratio and Modulation Transfer Function (MTF) as optical performance metrics for mid-spatial frequency. We then present how the orthogonality properties of Zernike polynomials along with linear systems theory of MTF can provide an effective tool in separating the optical performance degradation due to different mid-spatial frequency texture. We present an example of real mid-spatial frequency texture to examine the error in the approximation of MTF when using linear systems formulation.

Conference Presentation

Citation Download Citation

Zahra Hosseinimakarem, Angela D. Davies, and Chris J. Evans "Usefulness of orthogonal basis sets for predicting optical performance of wavefronts with mid-spatial frequency error", Proc. SPIE 10373, Applied Optical Metrology II, 1037302 (23 August 2017); https://doi.org/10.1117/12.2275831

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