Research on the displacement characteristic of piezoelectric transducer

Fang Wang; Xin Huang; Bo Zhang; Qingjie Lu; Shuo Zhu; Shouhong Tang; Sen Han

doi:10.1117/12.2505462

26 December 2018 Research on the displacement characteristic of piezoelectric transducer

Fang Wang, Xin Huang, Bo Zhang, Qingjie Lu, Shuo Zhu, Shouhong Tang, Sen Han

Proceedings Volume 10819, Optical Metrology and Inspection for Industrial Applications V; 1081905 (2018) https://doi.org/10.1117/12.2505462
Event: SPIE/COS Photonics Asia, 2018, Beijing, China

Abstract

Piezoelectric transducer (PZT) is often used in the field of precision measurement to realize the micro-positioning function, such as Fizeau interferometer. But due to its inherent severe hysteresis and nonlinear characteristics, the use of piezoelectric transducer is affected. A piezoelectric transducer control instrument was designed to measure the displacement characteristic curve of piezoelectric transducer. The instrument included the control system and data received system. The control system produces a triangular wave signal with adjustable amplitude and frequency, then calculated from received signal to drive the piezoelectric transducer. The output displacement information of piezoelectric transducer is collected by the signal acquisition circuit composed of displacement sensor and ADC analog-digital converter. The purpose of the single chip is collecting and processing displacement data. According to the experimental results, we can get the characteristics curve of the piezoelectric transducer, which support the basis analysis and available for the future experiment.

Citation Download Citation

Fang Wang, Xin Huang, Bo Zhang, Qingjie Lu, Shuo Zhu, Shouhong Tang, and Sen Han "Research on the displacement characteristic of piezoelectric transducer", Proc. SPIE 10819, Optical Metrology and Inspection for Industrial Applications V, 1081905 (26 December 2018); https://doi.org/10.1117/12.2505462

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