Dr. Shouhong Tang Profile

Dr. Shouhong Tang

SPIE Involvement:

Author

Publications (17)

Proceedings Article | 26 December 2018 Paper

Research on the displacement characteristic of piezoelectric transducer

Fang Wang, Xin Huang, Bo Zhang, Qingjie Lu, Shuo Zhu, Shouhong Tang, Sen Han

Proceedings Volume 10819, 1081905 (2018) https://doi.org/10.1117/12.2505462

KEYWORDS: Ferroelectric materials, Transducers, Control systems, Data acquisition, Resistance, Bridges, Laser applications, Ceramics, Sensors, Precision measurement

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Proceedings Article | 12 December 2018 Paper

Repeatability study on different interference systems

Linghua Zhang, Bo Zhang, Sen Han, Shouhong Tang, Chengjin Zhuang

Proceedings Volume 10847, 108470O (2018) https://doi.org/10.1117/12.2505406

KEYWORDS: Phase shifts, Interferometry, Ceramics, Ferroelectric materials, Fizeau interferometers, Gemini Planet Imager, Mirrors, Photovoltaics, Error analysis, Phase shift keying

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Proceedings Article | 26 June 2017 Paper

Application of identifying transmission spheres for spherical surface testing

Christopher Han, Xin Ye, Xueyuan Li, Quanzhao Wang, Shouhong Tang, Sen Han

Proceedings Volume 10329, 103293K (2017) https://doi.org/10.1117/12.2269979

KEYWORDS: Optical spheres, Spherical lenses, Interferometers, Fizeau interferometers, Microsoft Foundation Class Library, Measurement devices, Interferometry, Optical testing, Data processing, Eye, Optimization (mathematics), Interfaces

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Proceedings Article | 8 March 2017 Paper

Measurement of high accuracy flatness using a commercial interferometer

Yuchen Li, Xueyuan Li, Quanzhao Wang, Sen Han, Shouhong Tang, Quanying Wu, Linghua Zhang

Proceedings Volume 10255, 102551H (2017) https://doi.org/10.1117/12.2268364

KEYWORDS: Interferometers, Optics manufacturing, Temperature metrology, Photovoltaics, Calibration, Interferometry, Optical testing, Error analysis, Phase shifts, Data processing

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Proceedings Article | 21 November 2007 Paper

High accuracy measurements of objects with multiple reflective surfaces with wavelength shifting interferometry

Shouhong Tang, Richard Bills, Klaus Freischlad

Proceedings Volume 6723, 67230F (2007) https://doi.org/10.1117/12.782882

KEYWORDS: Interferometers, Glasses, Extreme ultraviolet lithography, Phase shifts, Reflectivity, Fizeau interferometers, Photomasks, Surface finishing, Phase shifting, Light sources

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Proceedings Article | 14 September 2007 Paper

Weighted least-square approach for simultaneous measurement of multiple reflective surfaces

Shouhong Tang, Richard Bills, Klaus Freischlad

Proceedings Volume 6671, 66710T (2007) https://doi.org/10.1117/12.735151

KEYWORDS: Phase shifts, Reflectivity, Fizeau interferometers, Surface finishing, Interferometers, Phase shifting, Tunable lasers, Reflection, Light sources, Refractive index

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Proceedings Article | 10 September 2007 Paper

Measuring height variation over entire wafer surface with high lateral resolution

Shouhong Tang, Brian Clendenin

Proceedings Volume 6672, 667209 (2007) https://doi.org/10.1117/12.735141

KEYWORDS: Semiconducting wafers, Interferometers, Semiconductors, Manufacturing, Metrology, Patents, Spatial resolution, Interferometry, Optical testing, Semiconductor manufacturing

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Proceedings Article | 10 September 2007 Paper

High resolution interferometric metrology for patterned wafers

Shouhong Tang, Klaus Freischlad, Petrie Yam

Proceedings Volume 6672, 667208 (2007) https://doi.org/10.1117/12.735121

KEYWORDS: Semiconducting wafers, Interferometry, Reflection, Metrology, Interferometers, Phase shifts, Reflectivity, Chemical mechanical planarization, Scanning probe microscopy, Wavefronts

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Proceedings Article | 10 September 2007 Paper

Interferometry for wafer dimensional metrology

Klaus Freischlad, Shouhong Tang, Jim Grenfell

Proceedings Volume 6672, 667202 (2007) https://doi.org/10.1117/12.732546

KEYWORDS: Semiconducting wafers, Interferometry, Interferometers, Photovoltaics, Dimensional metrology, Metrology, Wafer-level optics, Beam splitters, Cameras, Chemical mechanical planarization

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Proceedings Article | 10 December 2001 Paper

Interferometric metrology of wafer nanotopography for advanced CMOS process integration

John Valley, Chris Koliopoulos, Shouhong Tang

Proceedings Volume 4449, (2001) https://doi.org/10.1117/12.450091

KEYWORDS: Semiconducting wafers, Interferometry, Metrology, Statistical analysis, Chemical mechanical planarization, Interferometers, Polishing, Photovoltaics, Semiconductors, Manufacturing

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Proceedings Article | 6 July 1998 Paper

Stitching: high-spatial-resolution microsurface measurements over large areas

Shouhong Tang

Proceedings Volume 3479, (1998) https://doi.org/10.1117/12.316470

KEYWORDS: Spatial resolution, Microscopes, Objectives, Interferometry, Cameras, Imaging systems, Image resolution, Phase shifts, Interferometers, Optical testing

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Proceedings Article | 17 July 1996 Paper

Generalized algorithm for phase shifting interferometry

Shouhong Tang

Proceedings Volume 2860, (1996) https://doi.org/10.1117/12.276324

KEYWORDS: Phase shifts, Detection and tracking algorithms, Phase interferometry, Error analysis, Algorithm development, Electronic filtering, Photovoltaics, Sensors, Numerical simulations, Radium

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SPIE Journal Paper | 1 April 1992

Electronic speckle pattern interferometer with polarization phase-shift technique

Guan-chang Jin, Shouhong Tang

OE, Vol. 31, Issue 04, (April 1992) https://doi.org/10.1117/12.10.1117/12.155373

KEYWORDS: Polarization, Fringe analysis, Interferometers, Phase shifts, Speckle, Data processing, Polarizers, Speckle pattern, Phase interferometry, Ferroelectric materials

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Proceedings Article | 1 January 1991 Paper

Real-time edge extraction by active defocusing

Y.Y. Hung, Quiming Zhu, Dahuan Shi, Shouhong Tang

Proceedings Volume 1332, (1991) https://doi.org/10.1117/12.51083

KEYWORDS: Edge detection, Image processing, Digital signal processing, Cameras, Optical inspection, Optical testing, Convolution, Image enhancement, Signal to noise ratio, Digital image processing

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Proceedings Article | 1 January 1991 Paper

Three-dimensional surface inspection using interferometric grating and 2-D FFT-based technique

Y.Y. Hung, Shouhong Tang, Quiming Zhu

Proceedings Volume 1332, (1991) https://doi.org/10.1117/12.51120

KEYWORDS: Fringe analysis, Interferometry, Light sources, Inspection, Phase measurement, Optical testing, Optical inspection, 3D metrology, Prisms, Cameras

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Proceedings Article | 1 January 1991 Paper

Synchronous phase-extraction technique and its applications

Y.Y. Hung, Shouhong Tang, Guofan Jin, Quiming Zhu

Proceedings Volume 1332, (1991) https://doi.org/10.1117/12.51124

KEYWORDS: Fringe analysis, Radon, Optical testing, Optical inspection, Image processing, Phase measurement, Error analysis, Fourier transforms, Modulation, 3D image reconstruction

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Proceedings Article | 1 January 1991 Paper

New phase measurement for nonmonotonical fringe patterns

Shouhong Tang, Y.Y. Hung, Quiming Zhu

Proceedings Volume 1332, (1991) https://doi.org/10.1117/12.51123

KEYWORDS: Fringe analysis, Phase measurement, Optical testing, Phase shifts, Phase shift keying, Optical inspection, Fourier transforms, Moire patterns, Modulation, Computer engineering

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