Self-traceable nano-grating frequency doubling based on polarization gradient light field

Xinpan Wang; Xiao Deng; Yanni Cai; Feng Yang

doi:10.1117/12.2585373

4 December 2020 Self-traceable nano-grating frequency doubling based on polarization gradient light field

Xinpan Wang, Xiao Deng, Yanni Cai, Feng Yang

Proceedings Volume 11617, International Conference on Optoelectronic and Microelectronic Technology and Application; 116172P (2020) https://doi.org/10.1117/12.2585373
Event: International Conference on Optoelectronic and Microelectronic Technology and Application, 2020, Nanjing, China

Abstract

Self-traceable gratings with small scale are much desired in nano-metrology. Atom lithography is the fundamental technique to fabricate self-traceable gratings but the resolution of grating pitch is usually limited by the laser wavelength. To lower down the grating scale, an approach introducing the polarization gradient light field was demonstrated here to achieve the gratings frequency doubling. The influences of polarization gradient standing wave field and cooling light field on the internal atomic structure were first analyzed to illustrate the principle of frequency doubling. And it has been proven that the grating pitch can still perfectly keep traceable to the laser wavelength. Then a quarter-wavelength (λ/4) pitch of 106.4nm self-traceable grating was fabricated experimentally by atom lithography using 425.55nm laser. This approach is hopeful to realize the λ/8 pitch as well, which provides an effective way to fabricate the smaller-scale self-traceable gratings.

Citation Download Citation

Xinpan Wang, Xiao Deng, Yanni Cai, and Feng Yang "Self-traceable nano-grating frequency doubling based on polarization gradient light field", Proc. SPIE 11617, International Conference on Optoelectronic and Microelectronic Technology and Application, 116172P (4 December 2020); https://doi.org/10.1117/12.2585373

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