A two-axis water-immersible micro scanning mirror (WIMSM) using torsional and bending polymer hinges

Xiaoyu Duan; Jun Zou

doi:10.1117/12.2578907

5 March 2021 A two-axis water-immersible micro scanning mirror (WIMSM) using torsional and bending polymer hinges

Xiaoyu Duan, Jun Zou

Proceedings Volume 11697, MOEMS and Miniaturized Systems XX; 116970A (2021) https://doi.org/10.1117/12.2578907
Event: SPIE OPTO, 2021, Online Only

Abstract

In this paper, we report a new two-axis micro scanning mirror (WIMSM) using torsional and bending BoPET (biaxially-oriented polyethylene terephthalate) hinges. With a torsional hinge, the fast axis has a resonance frequency of 265 Hz in air and 172 Hz in water. With a torsional hinge, the fast axis has a resonance frequency of 265 Hz in air and 172 Hz in water. With a bending hinge, the slow axis has a resonance frequency less than 1 Hz. When the two axes are driven at their resonance frequencies, a dense raster scanning pattern with a maximal scanning range is obtained. For demonstration, 3D volumetric ultrasound microscopy in water is conducted with the new WIMSM.

Conference Presentation

Citation Download Citation

Xiaoyu Duan and Jun Zou "A two-axis water-immersible micro scanning mirror (WIMSM) using torsional and bending polymer hinges", Proc. SPIE 11697, MOEMS and Miniaturized Systems XX, 116970A (5 March 2021); https://doi.org/10.1117/12.2578907

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