Combined processing of optical parts through surface polishing with a beam of fast argon atoms and deposition of nanostructured protective films by magnetron target sputtering

Sergey N. Grigoriev; Alexander S. Metel; Yury A. Melnik; Enver S. Mustafaev; Marina A. Volosova

doi:10.1117/12.2594368

1 August 2021 Combined processing of optical parts through surface polishing with a beam of fast argon atoms and deposition of nanostructured protective films by magnetron target sputtering

Sergey N. Grigoriev, Alexander S. Metel, Yury A. Melnik, Enver S. Mustafaev, Marina A. Volosova

Author Affiliations +

Proceedings Volume 11802, Nanoengineering: Fabrication, Properties, Optics, Thin Films, and Devices XVIII; 118020V (2021) https://doi.org/10.1117/12.2594368
Event: SPIE Nanoscience + Engineering, 2021, San Diego, California, United States

Conference Poster

Abstract

The research presents the principles of development and practical implementation (including rational modes) of combined treatment technology for the surface of precision parts with a broad beam of ions and/or fast argon atoms. In a single technological cycle, two process stages are realized: polishing with a beam at an incidence of 80º to the surface of parts made of different material, which enables a precision level of the surface roughness and deposition of protective nanostructured films on the parts immersed in dense plasma produced by magnetron sputtering in a mixture of inert and reactive gases. The developed innovative technology has a wide range of technological applications, but a particularly promising area is the processing of optical parts and elements.

Citation Download Citation

Sergey N. Grigoriev, Alexander S. Metel, Yury A. Melnik, Enver S. Mustafaev, and Marina A. Volosova "Combined processing of optical parts through surface polishing with a beam of fast argon atoms and deposition of nanostructured protective films by magnetron target sputtering", Proc. SPIE 11802, Nanoengineering: Fabrication, Properties, Optics, Thin Films, and Devices XVIII, 118020V (1 August 2021); https://doi.org/10.1117/12.2594368

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

;

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE