Direct writing of conductive and semiconductive structures via the femtosecond laser-induced carbonization of a silicone elastomer

S. Hayashi; M. Terakawa

doi:10.1117/12.2646563

17 March 2023 Direct writing of conductive and semiconductive structures via the femtosecond laser-induced carbonization of a silicone elastomer

S. Hayashi, M. Terakawa

Author Affiliations +

Proceedings Volume 12411, Frontiers in Ultrafast Optics: Biomedical, Scientific, and Industrial Applications XXIII; 124110C (2023) https://doi.org/10.1117/12.2646563
Event: SPIE LASE, 2023, San Francisco, California, United States

Abstract

In this study, we patterned structures composed of graphitic and silicon carbide nanocrystals by the laser-induced carbonization of polydimethylsiloxane. The average size of the observed silicon carbide nanocrystals varied depending on the energy per laser pulse, or pulse energy, used for patterning, where larger crystals were observed for structures patterned with higher pulse energies. Moreover, the electrical property of the patterned structure shifted from conductive to semiconductive, as the pulse energy for patterning increased. To the best of our knowledge, this is the first demonstration of the patterning of structures exhibiting measurable semiconducting properties by the laser-induced carbonization of polymers.

Conference Presentation

Citation Download Citation

S. Hayashi and M. Terakawa "Direct writing of conductive and semiconductive structures via the femtosecond laser-induced carbonization of a silicone elastomer", Proc. SPIE 12411, Frontiers in Ultrafast Optics: Biomedical, Scientific, and Industrial Applications XXIII, 124110C (17 March 2023); https://doi.org/10.1117/12.2646563

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