Microgroove machining characteristics of Si3N4 ceramics by dual-beam coupled nanosecond laser

Xuanhua Zhang; Xiaoxiao Chen; Xianyou Chen; Wenwu Zhang; Lirong Huang

doi:10.1117/12.2648603

16 December 2022 Microgroove machining characteristics of Si₃N₄ ceramics by dual-beam coupled nanosecond laser

Xuanhua Zhang, Xiaoxiao Chen, Xianyou Chen, Wenwu Zhang, Lirong Huang

Proceedings Volume 12501, Seventeenth National Conference on Laser Technology and Optoelectronics; 1250108 (2022) https://doi.org/10.1117/12.2648603
Event: Seventeenth National Conference on Laser Technology and Optoelectronics, 2022, Shanghai, China

Abstract

Due to the characteristics of high hardness, wear resistance, corrosion resistance, excellent thermal shock resistance, and low thermal expansion coefficient, Si₃N₄ ceramics are widely used in aerospace, national defense, electronic and electrical, mechanical, chemical, and other fields. In this paper, the grooving experiments of Si₃N₄ ceramics were carried out by using a novel dual-beam coupled nanosecond pulse laser, and the influence of laser power and scanning speed on the surface morphology and geometric size of grooves were studied. The results show that the laser power has a significant effect on the surface morphology and geometric size of grooves. With the increase of laser power, the laser power density augments, and the width and depth of grooves increase. The groove width and groove depth first increase and then decrease with the increase of scanning speed, and both the groove width and depth reach the maximum value at scanning speed of 800 mm/min.

Citation Download Citation

Xuanhua Zhang, Xiaoxiao Chen, Xianyou Chen, Wenwu Zhang, and Lirong Huang "Microgroove machining characteristics of Si₃N₄ ceramics by dual-beam coupled nanosecond laser", Proc. SPIE 12501, Seventeenth National Conference on Laser Technology and Optoelectronics, 1250108 (16 December 2022); https://doi.org/10.1117/12.2648603

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KEYWORDS

Ceramics

Surface roughness

Laser energy

Laser processing

Semiconductor lasers

Pulsed laser operation

Laser scanners

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