Comparative research of mirror systems for extreme ultraviolet lithography illuminator

Shan Gao; Elena A. Tsyganok; Galina E. Romanova

doi:10.1117/12.2686671

28 November 2023 Comparative research of mirror systems for extreme ultraviolet lithography illuminator

Shan Gao, Elena A. Tsyganok, Galina E. Romanova

Proceedings Volume 12765, Optical Design and Testing XIII; 127650F (2023) https://doi.org/10.1117/12.2686671
Event: SPIE/COS Photonics Asia, 2023, Beijing, China

Abstract

Illuminator is one of the important components of extreme ultraviolet lithography system. Industrial extreme ultraviolet lithography illuminator uses two compound eyes and relay system, which can realize variety of illumination modes. But the manufacture and assembly of compound eyes are difficult. Therefore, we would like to design illuminators, which use such as Offner-relay system, quad elliptical mirrors, or other mirror systems. These systems do not have more complex surfaces, easier to assembly. Analyze advantages and disadvantages of these systems, and then discuss the possibility of using these systems in industrial extreme ultraviolet lithography.

(2023) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Shan Gao, Elena A. Tsyganok, and Galina E. Romanova "Comparative research of mirror systems for extreme ultraviolet lithography illuminator", Proc. SPIE 12765, Optical Design and Testing XIII, 127650F (28 November 2023); https://doi.org/10.1117/12.2686671

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available