Research on refractive index sensing of a mid-infrared asymmetric Mach-Zehnder interferometer sensing structure based on sensing arm suspension

Fang Wang; Shoudao Ma; Tao Ma; Hua Liu

doi:10.1117/12.2686709

6 August 2023 Research on refractive index sensing of a mid-infrared asymmetric Mach-Zehnder interferometer sensing structure based on sensing arm suspension

Fang Wang, Shoudao Ma, Tao Ma, Hua Liu

Author Affiliations +

Proceedings Volume 12781, International Conference on Optoelectronic Information and Functional Materials (OIFM 2023); 127811T (2023) https://doi.org/10.1117/12.2686709
Event: 2023 International Conference on Optoelectronic Information and Functional Materials (OIFM 2023), 2023, Guangzhou, JS, China

Abstract

A high refractive index sensitivity sensing structure that operates in the mid-infrared band using a suspended Gallium arsenide (GaAs) waveguide combined with a both-arm width asymmetric Mach-Zehnder interferometer (ASMZI) is proposed. The sensing arm of ASMZI uses a suspension structure to enhance the interaction of the evanescent field with the analyte and improve the refractive index sensitivity. The simulation analysis shows that the refractive index sensitivity(S) of the ASMZI are 930.9 nm/RIU. Our research facilitates the design of high-performance biochemical sensors, and a compact and miniaturized design can be easily integrated with other SOI devices.

Citation Download Citation

Fang Wang, Shoudao Ma, Tao Ma, and Hua Liu "Research on refractive index sensing of a mid-infrared asymmetric Mach-Zehnder interferometer sensing structure based on sensing arm suspension", Proc. SPIE 12781, International Conference on Optoelectronic Information and Functional Materials (OIFM 2023), 127811T (6 August 2023); https://doi.org/10.1117/12.2686709

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