KEYWORDS: Structural sensing, Refractive index, Waveguides, Sensors, Chemical analysis, Biological and chemical sensing, Mid-IR, Mach-Zehnder interferometers, 3D surface sensing, Gases
A high refractive index sensitivity sensing structure that operates in the mid-infrared band using a suspended Gallium arsenide (GaAs) waveguide combined with a both-arm width asymmetric Mach-Zehnder interferometer (ASMZI) is proposed. The sensing arm of ASMZI uses a suspension structure to enhance the interaction of the evanescent field with the analyte and improve the refractive index sensitivity. The simulation analysis shows that the refractive index sensitivity(S) of the ASMZI are 930.9 nm/RIU. Our research facilitates the design of high-performance biochemical sensors, and a compact and miniaturized design can be easily integrated with other SOI devices.
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