Paper
21 December 2023 Efficient and tolerant chip-to-chip optical coupling via silicon nitride grating couplers
Jinghao Wang, Zhen Wang, Chen Hu, Huan Zhang, Kun Yin, Haitao Wang
Author Affiliations +
Proceedings Volume 12966, AOPC 2023: AI in Optics and Photonics ; 129660Q (2023) https://doi.org/10.1117/12.3005779
Event: Applied Optics and Photonics China 2023 (AOPC2023), 2023, Beijing, China
Abstract
An efficient and tolerant chip-to-chip optical coupling approach employing silicon nitride grating couplers was proposed and investigated. The integration of bottom mirrors and the strategic extension of grating length led to notable results, with a peak coupling loss of -0.28 dB and a 1-dB alignment tolerance along the x-axis reaching 25.4 μm when using a grating length of 50 μm.
(2023) Published by SPIE. Downloading of the abstract is permitted for personal use only.
Jinghao Wang, Zhen Wang, Chen Hu, Huan Zhang, Kun Yin, and Haitao Wang "Efficient and tolerant chip-to-chip optical coupling via silicon nitride grating couplers", Proc. SPIE 12966, AOPC 2023: AI in Optics and Photonics , 129660Q (21 December 2023); https://doi.org/10.1117/12.3005779
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KEYWORDS
Optical gratings

Tolerancing

Silicon nitride

Diffraction gratings

Metals

Optical alignment

Mirrors

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