Site selection considerations for scanning and transmission electron microscopes

Wayne Vogen

doi:10.1117/12.56840

1 February 1992 Site selection considerations for scanning and transmission electron microscopes

Wayne Vogen

Proceedings Volume 1619, Vibration Control in Microelectronics, Optics, and Metrology; (1992) https://doi.org/10.1117/12.56840
Event: SPIE Technical: OPTCON '91, 1991, San Jose, CA, United States

Abstract

Environmental factors must be controlled including floor vibration, acoustic level and magnetic field when choosing a site for an electron microscope. A systematic procedure for selecting a site from possible candidates is presented in this paper.

Citation Download Citation

Wayne Vogen "Site selection considerations for scanning and transmission electron microscopes", Proc. SPIE 1619, Vibration Control in Microelectronics, Optics, and Metrology, (1 February 1992); https://doi.org/10.1117/12.56840

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