Using wavelength change as a depth scanner to overcome the mechanical vibration in confocal scanning optical microscope

Zhang Shen; ChunKan Tao; Xiaoliang Fu

doi:10.1117/12.56830

1 February 1992 Using wavelength change as a depth scanner to overcome the mechanical vibration in confocal scanning optical microscope

Zhang Shen, ChunKan Tao, Xiaoliang Fu

Author Affiliations +

Proceedings Volume 1619, Vibration Control in Microelectronics, Optics, and Metrology; (1992) https://doi.org/10.1117/12.56830
Event: SPIE Technical: OPTCON '91, 1991, San Jose, CA, United States

Abstract

Change of wavelength in a CSOM (confocal scanning optical microscope) can be used as a depth scanner without any mechanical movement so as to improve the quality of sectional images in a CSOM. This paper puts forward such a new CSOM system.

Citation Download Citation

Zhang Shen, ChunKan Tao, and Xiaoliang Fu "Using wavelength change as a depth scanner to overcome the mechanical vibration in confocal scanning optical microscope", Proc. SPIE 1619, Vibration Control in Microelectronics, Optics, and Metrology, (1 February 1992); https://doi.org/10.1117/12.56830

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