Application of laser-induced microwave photoconductivity in diagnostics of semiconductor surface layers

Alexander A. Manenkov; Sergei Yurievich Sokolov; Sergei Yu. Popov

doi:10.1117/12.183145

10 August 1994 Application of laser-induced microwave photoconductivity in diagnostics of semiconductor surface layers

Alexander A. Manenkov, Sergei Yurievich Sokolov, Sergei Yu. Popov

Proceedings Volume 2097, Laser Applications; (1994) https://doi.org/10.1117/12.183145
Event: Laser Optics, 1993, St. Petersburg, Russian Federation

Abstract

The potentials of laser-induced microwave photoconductivity (LMP) as a diagnostic method for semiconductor surface studies are considered in this paper. The principals and practical realization aspects including a block-diagram and technical characteristics of the LMP apparatus, and some experimental data on electron-recombination properties of Si and GaAs surfaces are presented. The data include investigation of non equilibrium carrier relaxation channels and rates, influence of various defects (traps, adhesion centers, dislocations etc.), and spatial variations of these relaxation characteristics in surface layers modified with different procedures (ion implantation, laser annealing, mechanical treatment). Among the remote action of surface modification and interaction of locally modified zones. These effects are shown to be very important in the physics and technology of semiconductor surface modification. It is concluded that the LMP method is very informative diagnostic tool for testing and studying of semiconductor surfaces and device structures used in microelectronics, power electronics and optoelectronics.

Citation Download Citation

Alexander A. Manenkov, Sergei Yurievich Sokolov, and Sergei Yu. Popov "Application of laser-induced microwave photoconductivity in diagnostics of semiconductor surface layers", Proc. SPIE 2097, Laser Applications, (10 August 1994); https://doi.org/10.1117/12.183145

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available