Fabrication of piezoresistive-sensed AFM cantilever probe with integrated tip

Ivo W. Rangelow; Feng Shi; Peter Hudek; Teodor Gotszalk; Piotr B. Grabiec; Piotr Dumania

doi:10.1117/12.251232

23 September 1996 Fabrication of piezoresistive-sensed AFM cantilever probe with integrated tip

Ivo W. Rangelow, Feng Shi, Peter Hudek, Teodor Gotszalk, Piotr B. Grabiec, Piotr Dumania

Proceedings Volume 2879, Micromachining and Microfabrication Process Technology II; (1996) https://doi.org/10.1117/12.251232
Event: Micromachining and Microfabrication '96, 1996, Austin, TX, United States

Abstract

First piezoresistive AFM sensor developed by Quate was based on SOI technology. Alternative technology for fabrication of microtips integrated with silicon cantilever beam, used as a microprobe in atomic force microscopy, is described in this paper. It is based on a bulk micromachining to define the cantilever thickness, surface micromachining to develop sharp tip and standard IC planar processing. Specific sequence of plasma treated photoresist and hard masking steps followed by wet isotropic, wet anisotropic and dry etching is utilized to obtain very sharp silicon tips. First, HF/HNO₃ based polishing etchant is used to create mesa islands at the end of the formed cantilever. Next, a planar IC processing sequence is realized to fabricate piezoresistive Wheatstone bridge which will serve as a force sensing element. Thickness of the beam is precisely controlled by electrochemical etch-stop technique in. Then, sharp tip is formed by both RIE and/or wet etching, using under-cutting method. Finally, deep anisotropic silicon etching combined with SF₆/Ar plasma etching is used to create cantilever silicon beam.

Citation Download Citation

Ivo W. Rangelow, Feng Shi, Peter Hudek, Teodor Gotszalk, Piotr B. Grabiec, and Piotr Dumania "Fabrication of piezoresistive-sensed AFM cantilever probe with integrated tip", Proc. SPIE 2879, Micromachining and Microfabrication Process Technology II, (23 September 1996); https://doi.org/10.1117/12.251232

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