Prof. Piotr B. Grabiec
Head of Electron Technology at Institute of Microelectronics and Photonics
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Author
Publications (40)

Proceedings Article | 10 November 2016 Paper
Michał Zaborowski, Anna Baraniecka, Jerzy Zając, Krzysztof Domański, Piotr Grabiec
Proceedings Volume 10161, 101610Y (2016) https://doi.org/10.1117/12.2244502
KEYWORDS: Sensors, Semiconducting wafers, Electrodes, Silicon, Skin, Glasses, Thin films, Gold, Electroluminescence, Wet etching

Proceedings Article | 10 November 2016 Paper
Piotr Prokaryn, Pawel Janus, Jerzy Zajac, Andrzej Sierakowski, Krzysztof Domanski, Piotr Grabiec
Proceedings Volume 10161, 1016107 (2016) https://doi.org/10.1117/12.2245041
KEYWORDS: Deposition processes, Gold, Silicon, Sensors, Calibration, Electrodes, Profilometers, Platinum, Velocity measurements, Metals

Proceedings Article | 10 November 2016 Paper
F. Ivaldi, T. Bieniek, P. Janus, P. Grabiec, W. Majstrzyk, D. Kopiec, T. Gotszalk
Proceedings Volume 10161, 1016102 (2016) https://doi.org/10.1117/12.2244154
KEYWORDS: Sensors, Microopto electromechanical systems, Micromirrors, Calibration, Electronics, Head, Laser sources, System integration, Signal to noise ratio, Data acquisition

Proceedings Article | 10 November 2016 Paper
Paweł Janus, Rafał Dobrowolski, Andrzej Sierakowski, Francesco Ivaldi, Dariusz Szmigiel, Jerzy Zając
Proceedings Volume 10161, 1016104 (2016) https://doi.org/10.1117/12.2244789
KEYWORDS: Atomic force microscopy, Dielectrics, Silicon, Manufacturing, Silica, Finite element methods, Etching, Sensors, Optics manufacturing, Deep reactive ion etching

Proceedings Article | 10 November 2016 Paper
Andrzej Sierakowski, Piotr Prokaryn, Rafał Dobrowolski, Anna Malinowska, Dariusz Szmigiel, Piotr Grabiec, Damian Trojanowski, Dagmara Jakimowicz, Jolanta Zakrzewska-Czerwinska
Proceedings Volume 10161, 1016106 (2016) https://doi.org/10.1117/12.2245033
KEYWORDS: Microfluidics, Fabrication, Polymers, Lithography, Photoresist materials, 3D modeling, Silicon, Optical lithography, Process modeling, Polymethylmethacrylate

Showing 5 of 40 publications
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