Light diffraction and new laser technologies for maskless formation of submicron relief structures

Vladislav Ya. Panchenko

doi:10.1117/12.262969

27 December 1996 Light diffraction and new laser technologies for maskless formation of submicron relief structures

Vladislav Ya. Panchenko

Proceedings Volume 3052, Ninth International School on Quantum Electronics: Lasers--Physics and Applications; (1996) https://doi.org/10.1117/12.262969
Event: Ninth International School on Quantum Electronics: Lasers: Physics and Applications, 1996, Varna, Bulgaria

Abstract

The review of theoretical and experimental investigations on maskless formation of submicron periodic relief gratings on the surface of A^IIIB^V semiconductor materials, carried out in the Scientific Research Center for Technological Lasers of Russian Academy of Sciences is presented. The lecture is based on the materials, which were presented in the original papers. The revue of the literature can be found in the above references.

Citation Download Citation

Vladislav Ya. Panchenko "Light diffraction and new laser technologies for maskless formation of submicron relief structures", Proc. SPIE 3052, Ninth International School on Quantum Electronics: Lasers--Physics and Applications, (27 December 1996); https://doi.org/10.1117/12.262969

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