Spherical aberration correction of a focused ion beam with space charge

Jon Orloff

doi:10.1117/12.279398

25 September 1997 Spherical aberration correction of a focused ion beam with space charge

Jon Orloff

Proceedings Volume 3155, Charged Particle Optics III; (1997) https://doi.org/10.1117/12.279398
Event: Optical Science, Engineering and Instrumentation '97, 1997, San Diego, CA, United States

Abstract

Focused ion beam (FIB) technology is widely used for micromachining, which includes removal from and addition of material to a substrate with sub-micrometer beams. In order to maximize the rate at which micromachining is done it is necessary to use the highest feasible beam currents, which results in the ion beams being severely affected by spherical aberration. We have investigated the possibility of reducing the spherical aberration of a FIB focusing column by means of space charge, by introducing a negative space charge cloud into an einzel lens.

Citation Download Citation

Jon Orloff "Spherical aberration correction of a focused ion beam with space charge", Proc. SPIE 3155, Charged Particle Optics III, (25 September 1997); https://doi.org/10.1117/12.279398

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available