Photocantilever: an integrated microprobe for near-field optical microscopy

Kenji Fukuzawa; Yuriko Tanaka; Hiroki Kuwano; Hiroshi Yoshikawa; Toshifumi Ohkubo; Tadashi Kato

doi:10.1117/12.363858

22 September 1999 Photocantilever: an integrated microprobe for near-field optical microscopy

Kenji Fukuzawa, Yuriko Tanaka, Hiroki Kuwano, Hiroshi Yoshikawa, Toshifumi Ohkubo, Tadashi Kato

Proceedings Volume 3791, Near-Field Optics: Physics, Devices, and Information Processing; (1999) https://doi.org/10.1117/12.363858
Event: SPIE's International Symposium on Optical Science, Engineering, and Instrumentation, 1999, Denver, CO, United States

Abstract

We have developed an integrated micro-probe with improved detection efficiency for apertureless near-field scanning optical microscopy (NSOM) by using micromachining techniques; we call this probe a `photocantilever'. A photocantilever is an integrated micro-cantilever with a pn- junction at its end; it is fabricated using micromachining techniques. It has achieve higher collection efficiency than conventional NSOM probes because the detector is placed close to the scatterer. Two new types of NSOM can be performed using this photocantilever: totally-internal- reflection-illumination-based NSOM and differential NSOM. Both provide NSOMs with high spatial resolution. The photocantilever enables apertureless NSOM with high collection efficiency and high resolution.

Citation Download Citation

Kenji Fukuzawa, Yuriko Tanaka, Hiroki Kuwano, Hiroshi Yoshikawa, Toshifumi Ohkubo, and Tadashi Kato "Photocantilever: an integrated microprobe for near-field optical microscopy", Proc. SPIE 3791, Near-Field Optics: Physics, Devices, and Information Processing, (22 September 1999); https://doi.org/10.1117/12.363858

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