Laser systems for generation of x-ray radiation

Miroslaw Szczurek; Andrzej Bartnik; Henryk Fiedorowicz; Roman Jarocki; Jerzy Kostecki

doi:10.1117/12.405996

2 November 2000 Laser systems for generation of x-ray radiation

Miroslaw Szczurek, Andrzej Bartnik, Henryk Fiedorowicz, Roman Jarocki, Jerzy Kostecki

Proceedings Volume 4238, Laser Technology VI: Applications; (2000) https://doi.org/10.1117/12.405996
Event: Laser Technology VI, 1999, Szczecin, Poland

Abstract

Laser-produced plasma is an efficient source of x-ray radiation and has been widely used in science and technology. As a result of rapid development of x-ray optics during the last decades a significant increase in x-ray applications has been observed. In the paper we have described conditions of efficient generation of x-ray radiation from laser-produced plasma. These conditions determine characteristics of laser radiation to be used for plasma creation. We have discussed parameters of laser systems used for x-ray generation with respect to applications in lithography and microscopy. We have presented selected laser systems, which have been used for generation of non-coherent and coherent x-ray radiation.

Citation Download Citation

Miroslaw Szczurek, Andrzej Bartnik, Henryk Fiedorowicz, Roman Jarocki, and Jerzy Kostecki "Laser systems for generation of x-ray radiation", Proc. SPIE 4238, Laser Technology VI: Applications, (2 November 2000); https://doi.org/10.1117/12.405996

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