Prof. Henryk Fiedorowicz Profile

Prof. Henryk Fiedorowicz

Professor at Wojskowa Akademia Techniczna

SPIE Involvement:

Author

Publications (91)

SPIE Journal Paper | 8 February 2024 Open Access

Open Access

Reflectance properties of the Acktar Magic Black™ coating for the radiation near the Lyman-α line of hydrogen: measurements and phenomenological model of the BRDF

Marek Strumik, Martyna Wardzińska, Maciej Bzowski, Przemysław Wachulak, Roman Wawrzaszek, Tomasz Fok, Andrzej Bartnik, Karol Mostowy, Henryk Fiedorowicz, Łukasz Węgrzyński, Mateusz Majszyk

JATIS, Vol. 10, Issue 01, 018004, (February 2024) https://doi.org/10.1117/12.10.1117/1.JATIS.10.1.018004

KEYWORDS: Bidirectional reflectance transmission function, Reflectivity, Coating, Ultraviolet radiation, Simulations, Scattering, Extreme ultraviolet, Data modeling, Tunable filters, CCD cameras

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Proceedings Article | 8 June 2023 Presentation

Presentation

Recent advances in the development and application of laser plasma X-ray and extreme ultraviolet (EUV) sources based on a gas puff target

Henryk Fiedorowicz

Proceedings Volume PC12582, PC125820H (2023) https://doi.org/10.1117/12.2666619

KEYWORDS: Extreme ultraviolet, X-rays, Plasma, X-ray lasers, Optical coherence tomography, X-ray technology, X-ray optics, Tomography, Technology, Radiography

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Proceedings Article | 8 June 2023 Presentation

Presentation

Temporal and spectral investigation of EUV and SXR induced plasmas (Conference Presentation)

Andrzej Bartnik, Wojciech Skrzeczanowski, Mateusz Majszyk, Przemyslaw Wachulak, Henryk Fiedorowicz, Tomasz Fok, Lukasz Wegrzynski

Proceedings Volume PC12576, PC1257605 (2023) https://doi.org/10.1117/12.2664743

KEYWORDS: Plasmas, Extreme ultraviolet, Gases, Molecules, Ionization, Chemical species, Xenon, X-rays, X-ray sources, Ultraviolet radiation

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Proceedings Article | 13 December 2022 Paper

Paper

Ray-tracing simulations of a UV/VUV beamline for the PolFEL free electron laser

Martyna Wardzińska, Henryk Fiedorowicz, Andrzej Bartnik, Tomasz Fok, Przemysław Wachulak, Łukasz Węgrzyński, Karolina Szamota-Leandersson, Jacek Krzywiński, Paweł Krawczyk, Mateusz Majszyk, Peter Baumgärtel, Frank Siewert, Andrey Sokolov

Proceedings Volume 12502, 1250206 (2022) https://doi.org/10.1117/12.2663447

KEYWORDS: Mirrors, Free electron lasers, Ultraviolet radiation, Optical simulations, Vacuum ultraviolet, X-rays, Monochromators, Diffraction gratings

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Proceedings Article | 13 December 2022 Paper

Paper

Nanoscale optical coherence tomography using extreme ultraviolet radiation produced with a laser plasma source based on a gas puff target

Antony Jose Arikkatt, Przemysław Wachulak, Henryk Fiedorowicz, Andrzej Bartnik, Piotr Nyga, Karol Janulewicz

Proceedings Volume 12502, 1250207 (2022) https://doi.org/10.1117/12.2661524

KEYWORDS: Extreme ultraviolet, Optical coherence tomography, Plasma, Reflectivity, Multilayers, Spectroscopy, Zirconium, Optical filters, Mirrors, Gas lasers

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Proceedings Article | 22 October 2019 Presentation

Presentation

Recent advances in development and application of laser plasma x-ray sources based on a gas puff target (Conference Presentation)

Henryk Fiedorowicz, Przemyslaw Wachulak, Andrzej Bartnik

Proceedings Volume 11110, 111100F (2019) https://doi.org/10.1117/12.2529025

KEYWORDS: X-ray sources, Plasma, X-rays, Extreme ultraviolet, Optical coherence tomography, Pulsed laser operation, Spectroscopy, Laser applications, X-ray technology, Laser development

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Proceedings Article | 9 September 2019 Presentation + Paper

Presentation + Paper

Nanoimaging using a compact laser plasma soft x-ray source based on a gas puff target

Przemysław Wachulak, Andrzej Bartnik, Henryk Fiedorowicz

Proceedings Volume 11112, 111120V (2019) https://doi.org/10.1117/12.2529468

KEYWORDS: X-rays, Microscopes, Plasma, X-ray imaging, X-ray sources, X-ray microscopy, Optical coherence tomography, Nanoimaging, Spatial resolution, Laser development

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Proceedings Article | 22 July 2019 Paper

Paper

Advances in microscopic imaging at the nanoscale using soft X-rays and extreme ultraviolet (EUV) from a compact laser plasma source

Przemyslaw Wachulak, Andrzej Bartnik, Henryk Fiedorowicz

Proceedings Volume 11076, 1107606 (2019) https://doi.org/10.1117/12.2526737

KEYWORDS: Microscopes, Extreme ultraviolet, X-rays, Plasma, X-ray imaging, Spatial resolution, X-ray optics, Light sources, X-ray microscopy, EUV optics

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Proceedings Article | 19 July 2019 Paper

Paper

A nanometer axial resolution x-ray coherence tomography with a broadband SXR radiation emitted from a compact laser plasma double-stream gas-puff target source

Przemyslaw Wachulak, Andrzej Bartnik, Antony Jose Arikkatt, Henryk Fiedorowicz

Proceedings Volume 11078, 110780T (2019) https://doi.org/10.1117/12.2526523

KEYWORDS: Plasma, X-rays, Optical coherence tomography, Tomography, Reflectivity, Extreme ultraviolet, Krypton, Spectroscopy

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Proceedings Article | 14 May 2019 Presentation

Presentation

Interaction of intense nanosecond pulses of extreme ultraviolet (EUV) with gases and solids (Conference Presentation)

Andrzej Bartnik, Wojciech Skrzeczanowski, Joanna Czwartos, Jerzy Kostecki, Henryk Fiedorowicz, Przemyslaw Wachulak, Tomasz Fok

Proceedings Volume 11035, 110350E (2019) https://doi.org/10.1117/12.2520742

KEYWORDS: Extreme ultraviolet, Gases, Solids, Plasma, Chemical species, Molecules, Ionization, Polymers, Pulsed laser operation, Laser systems engineering

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In this work investigations concerning interaction of intense, nanosecond EUV pulses with matter were performed. Various laser-produced plasma radiation sources were employed for creation of the driving EUV pulses. The sources were based on two different laser systems with pulse energies ranging from 0.8 J to 10J and pulse duration 4 ÷ 10 ns. They were equipped with the EUV collectors for focusing of the radiation. This way radiation fluence up to 0.5 J/cm2 in the interaction region was obtained. In our experiments solid material samples or gases injected into the vacuum chamber synchronously with the EUV pulses were irradiated. Irradiation of the gases resulted in ionization and excitation of atoms and molecules forming low temperature plasmas with a relatively high electron density. Emission spectra obtained from these plasmas, contained spectral lines corresponding to radiative transitions in atoms, molecules, atomic or molecular ions. For analysis of the EUV spectra numerical simulations were performed, using a collisional-radiative PrismSPECT code. For computer simulations of the molecular spectra measured in the UV/VIS range a LIFBASE and Specair codes were employed. This way ionization states together with various thermodynamic parameters were deduced. Irradiation of solid samples resulted in melting of a thin near-surface layer or, in some cases its ablation or even conversion to a low temperature plasma. It depended on physico-chemical properties of the material and its thickness. In case of organic polymers, usually ablation connected with fragmentation of the polymer molecules, took place. In case of thick samples of inorganic solids, a thin near surface layer was heated up to a high temperature exceeding melting or even boiling point. In most cases different kinds of micro- or nanostructures were created, modifying the surface morphology. Except the EUV interaction with solid materials, simultaneous EUV and the EUV induced plasma treatment was investigated. Plasmas were created in gases injected close to the exposed surface. Part of the EUV radiation was absorbed in the injected gas forming the low temperature plasma near the surface, while the other part of radiation, that was not absorbed, interacted with the surface material. This way additional atoms could be incorporated into the molecular structure of the exposed material, or reactive etching took place. Especially interesting results were obtained using molecular gases for creation the reactive plasmas.

Proceedings Article | 26 April 2019 Paper

Paper

Silicon carbide detectors for diagnostics of laser-produced plasmas

A. Torrisi, P. Wachulak, H. Fiedorowicz, L. Torrisi

Proceedings Volume 11032, 110320W (2019) https://doi.org/10.1117/12.2527311

KEYWORDS: Nd:YAG lasers, X-ray detectors, Silicon carbide, Sensors, Silicon, Plasmas, Signal detection, Optical filters

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Proceedings Article | 26 April 2019 Presentation + Paper

Presentation + Paper

EUV-induced plasmas created using intense ionizing radiation pulses from laser-produced plasma sources

A. Bartnik, P. Wachulak, H. Fiedorowicz, T. Fok, Ł. Wegrzynski

Proceedings Volume 11032, 110320I (2019) https://doi.org/10.1117/12.2520355

KEYWORDS: Extreme ultraviolet, Plasmas, Gases, Ions, Electrons, Mirrors, Signal detection, Argon, Xenon, Krypton

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Proceedings Article | 26 April 2019 Presentation + Paper

Presentation + Paper

Tomography with compact laser plasma double-stream gas-puff target source of the EUV and SXR radiation

P. Wachulak, A. J. Arikkatt, A. Bartnik, Ł. Węgrzyński, H. Fiedorowicz

Proceedings Volume 11032, 110320H (2019) https://doi.org/10.1117/12.2522249

KEYWORDS: Extreme ultraviolet, Tomography, Optical coherence tomography, Plasma, Reflectivity, Visualization, X-rays, Absorption

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Proceedings Article | 26 April 2019 Presentation + Paper

Presentation + Paper

Cluster and aerosol targets, produced using a gas puff approach, for laser-matter interaction experiments

Ł. Węgrzyński, A. Bartnik, P. Wachulak, T. Fok, K. Janulewicz, H. Fiedorowicz

Proceedings Volume 11032, 110320L (2019) https://doi.org/10.1117/12.2527307

KEYWORDS: Aerosols, Laser scattering, Light scattering, Laser-matter interactions, Plasma

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Proceedings Article | 26 April 2019 Presentation + Paper

Presentation + Paper

Tomographic imaging using a compact soft X-ray microscope based on a laser plasma light source

P. Wachulak, A. Torrisi, W. Krauze, A. Bartnik , J. Kostecki, M. Maisano, H. Fiedorowicz

Proceedings Volume 11032, 110320N (2019) https://doi.org/10.1117/12.2527310

KEYWORDS: Nanoimaging, Microscopy, Laser applications, Laser imaging, Nd:YAG lasers, Tomography, X-rays, 3D acquisition, 3D image processing, Spatial resolution, Plasma, 3D image reconstruction, Silicon

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Proceedings Article | 26 April 2019 Paper

Paper

Pulsed radiography and tomography of transient and low-density objects using laser plasma sources of extreme ultraviolet (EUV)

Tomasz Fok, Przemysław Wachulak, Łukasz Węgrzyński, Andrzej Bartnik, Roman Jarocki, Henryk Fiedorowicz

Proceedings Volume 11032, 110320M (2019) https://doi.org/10.1117/12.2527306

KEYWORDS: Extreme ultraviolet, Argon, Tomography, Modulation, Radiography, Helium, Plasma, Gases, 3D modeling, Pulsed laser operation

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Proceedings Article | 24 April 2019 Presentation + Paper

Presentation + Paper

Near-edge x-ray absorption fine structure spectroscopy with laser plasma sources of soft x-ray radiation

P. Wachulak, M. Duda, T. Fok, A. Bartnik, Ł. Węgrzyński, H. Fiedorowicz

Proceedings Volume 11035, 110350M (2019) https://doi.org/10.1117/12.2522246

KEYWORDS: Absorption, Spectroscopy, X-rays, Plasma, Laser spectroscopy, Plasma spectroscopy, Polymers

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Proceedings Article | 24 April 2019 Paper

Paper

Plasma density shaping for attosecond electron bunch generation

Andrzej Kornaszewski, Roman Spesyvtsev, Mohammed Shahzad, Enrico Brunetti, Przemysław Wachulak, Tomasz Fok, Łukasz Węgrzyński, Giorgio Battaglia, Bernard Ersfeld, James Feehan, Lucas Inigo Gamiz, Karolina Kokurewicz, Wentao Li, Antoine Maitrallain, Adam Noble, Lewis Reid, Matthew Tooley, Gregory Vieux, Samuel Wiggins, Sam Yoffe, Henryk Fiedorowicz, Dino Jaroszynski

Proceedings Volume 11036, 110360R (2019) https://doi.org/10.1117/12.2522780

KEYWORDS: Plasma, Extreme ultraviolet, Pulsed laser operation, 3D modeling, Computer simulations, Modulation

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Proceedings Article | 3 January 2019 Paper

Paper

A single-shot near edge x-ray absorption fine structure spectroscopy using double stream gas puff target source

Martin Duda, Przemysław Wachulak, Tomasz Fok, Łukasz Węgrzyński, Alexandr Jančárek, Henryk Fiedorowicz

Proceedings Volume 11042, 110420T (2019) https://doi.org/10.1117/12.2522429

KEYWORDS: Absorption, Spectroscopy, X-rays, Nitrogen, Absorption spectroscopy, Silicon, Plasma, Carbon, Numerical simulations

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Proceedings Article | 18 December 2018 Paper

Paper

Optical systems for laser-produced plasma EUV and soft x-ray sources

A. Bartnik, H. Fiedorowicz, P. Wachulak, T. Fok, Ł. Węgrzyński

Proceedings Volume 10976, 109760K (2018) https://doi.org/10.1117/12.2518202

KEYWORDS: Extreme ultraviolet, Plasma, Mirrors, Xenon, Gases, Sensors, Krypton, Neon, X-ray sources, Pulsed laser operation

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Proceedings Article | 4 December 2018 Paper

Paper

NEXAFS spectroscopy and spectromicroscopy with laser-produced plasma sources of soft x-ray radiation

P. Wachulak, M. Duda, A. Bartnik, A. Sarzyński, Ł. Węgrzyński, T. Fok, H. Fiedorowicz

Proceedings Volume 10974, 1097412 (2018) https://doi.org/10.1117/12.2518237

KEYWORDS: Plasma, Spectroscopy, X-rays, Absorption, Pulsed laser operation, Krypton, Laser energy, Synchrotrons, Carbon

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Proceedings Article | 4 December 2018 Paper

Paper

Experimental devices for produce gas cluster and aerosol targets for laser matter experiments

Ł. Wegrzynski, A. Bartnik, T. Fok, P. Wachulak, K. Janulewicz, H. Fiedorowicz

Proceedings Volume 10974, 1097413 (2018) https://doi.org/10.1117/12.2518412

KEYWORDS: Aerosols, Electromagnetism, Ultrasonics, Liquids, Transducers, Laser scattering, Scattering, Gases, Mie scattering

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Proceedings Article | 4 December 2018 Paper

Paper

Investigation of low temperature plasmas induced using laser-produced plasma EUV sources

A. Bartnik, W. Skrzeczanowski, J. Czwartos, J. Kostecki, P. Wachulak, T. Fok, H. Fiedorowicz

Proceedings Volume 10974, 1097411 (2018) https://doi.org/10.1117/12.2516144

KEYWORDS: Plasmas, Extreme ultraviolet, Fluorine, Ions, Gases, Nitrogen, Silicon, Oxygen

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Proceedings Article | 18 September 2018 Presentation

Presentation

Testing of soft X-ray and EUV grazing incidence optics using compact laser plasma light sources (Conference Presentation)

Henryk Fiedorowicz, Andrzej Bartnik, Przemyslaw Wachulak

Proceedings Volume 10760, 1076004 (2018) https://doi.org/10.1117/12.2321438

KEYWORDS: Laser optics, X-rays, Grazing incidence, Plasma, Extreme ultraviolet, EUV optics, X-ray optics, Light sources, Mirrors, Nd:YAG lasers

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Proceedings Article | 17 September 2018 Presentation

Presentation

New experimental techniques for nano-imaging and nano-spectroscopy based on compact laser plasma sources of soft x-rays and extreme ultraviolet (Conference Presentation)

Henryk Fiedorowicz, Przemyslaw Wachulak, Andrzej Bartnik

Proceedings Volume 10726, 107260I (2018) https://doi.org/10.1117/12.2321328

KEYWORDS: Extreme ultraviolet, X-rays, Plasma, Nanoimaging, X-ray sources, X-ray microscopy, Electromagnetic radiation, Plasma generation, Nd:YAG lasers, Xenon

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Proceedings Article | 31 May 2017 Paper

Paper

Reflective optics for effective collection of x-ray and EUV radiation: use for creation of photoionized plasmas and detection of weak signals

A. Bartnik, W. Skrzeczanowski, P. Wachulak, I. Saber, H. Fiedorowicz, T. Fok, Ł. Węgrzyński

Proceedings Volume 10235, 102350D (2017) https://doi.org/10.1117/12.2269438

KEYWORDS: Spectrographs, Mirrors, EUV optics, Neon, Extreme ultraviolet, Plasmas, X-rays, Gases, Ions, Reflectivity, X-ray optics, Signal detection, Nd:YAG lasers

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Proceedings Article | 17 May 2017 Presentation + Paper

Presentation + Paper

Soft x-ray imaging with incoherent sources

P. Wachulak, A. Torrisi, M. Ayele, A. Bartnik, J. Czwartos, Ł. Węgrzyński, T. Fok, T. Parkman, Š. Vondrová, J. Turnová, M. Odstrcil, H. Fiedorowicz

Proceedings Volume 10243, 102430O (2017) https://doi.org/10.1117/12.2265093

KEYWORDS: Extreme ultraviolet, Microscopy, Microscopes, X-ray imaging, X-rays, Nanotechnology, Image resolution, X-ray microscopy, Plasma, Photoresist materials, Optical filters, Silicon, Extreme ultraviolet lithography

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Proceedings Article | 8 December 2016 Paper

Paper

Soft X-ray microscope with nanometer spatial resolution and its applications

P. Wachulak, A. Torrisi, A. Bartnik, L. Wegrzynski, T. Fok, Z. Patron, H. Fiedorowicz

Proceedings Volume 10159, 101590W (2016) https://doi.org/10.1117/12.2259877

KEYWORDS: X-rays, Microscopes, Spatial resolution, Nitrogen, Zone plates, Silicon, Visible radiation, Optical filters, Microscopy, Plasma

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Proceedings Article | 8 December 2016 Paper

Paper

Low temperature plasmas created by photoionization of gases with intense radiation pulses from laser-produced plasma sources

A. Bartnik, T. Pisarczyk, P. Wachulak, T. Chodukowski, T. Fok, Ł. Węgrzyński, Z. Kalinowska, H. Fiedorowicz

Proceedings Volume 10159, 1015909 (2016) https://doi.org/10.1117/12.2258588

KEYWORDS: Plasmas, Neon, Extreme ultraviolet, Ions, Absorption, Laser systems engineering, Picosecond phenomena, Ionization, Chemical species, Photons

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Proceedings Article | 12 May 2015 Paper

Paper

Laser plasma sources of soft x-rays and extreme ultraviolet (EUV) for application in science and technology

Andrzej Bartnik, Przemysław Wachulak, Roman Jarocki, Jerzy Kostecki, Mirosław Szczurek, Daniel Adjei, Inam Ul Ahad, Mesfin Ayele, Tomasz Fok, Anna Szczurek, Alfio Torrisi, Łukasz Węgrzyński, Henryk Fiedorowicz

Proceedings Volume 9510, 95100Q (2015) https://doi.org/10.1117/12.2182167

KEYWORDS: Extreme ultraviolet, Plasma, X-rays, Polymers, X-ray microscopy, X-ray imaging, X-ray sources, Mirrors, Microscopes, Microscopy

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Proceedings Article | 12 May 2015 Paper

Paper

A compact “water-window” microscope with 60-nm spatial resolution based on a double stream gas-puff target and Fresnel zone plate optics

Przemyslaw Wachulak, Alfio Torrisi, Muhammad Nawaz, Daniel Adjei, Andrzej Bartnik, Jerzy Kostecki, Łukasz Wegrzynski, Šárka Vondrová, Jana Turňová, Tomasz Fok, Alexandr Jančarek, Henryk Fiedorowicz

Proceedings Volume 9510, 95100M (2015) https://doi.org/10.1117/12.2181431

KEYWORDS: Microscopes, Spatial resolution, Nitrogen, Plasma, Zone plates, Signal to noise ratio, Visible radiation, Optical filters, Microscopy, Titanium

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Proceedings Article | 12 May 2015 Paper

Paper

Photoionized plasmas in laboratory: a connection to astrophysics and planetary sciences

A. Bartnik, T. Pisarczyk, P. Wachulak, T. Chodukowski, T. Fok, Ł. Wegrzynski, Z. Kalinowska, H. Fiedorowicz, R. Jarocki, M. Szczurek, E. Krousky, M. Pfeifer, J. Skala, J. Ullschmied, J. Dostal, R. Dudzak, J. Hrebícek, T. Medrik, J. Cikhardt, B. Cikhardtova, D. Klir, K. Rezac, L. Pina

Proceedings Volume 9510, 95100P (2015) https://doi.org/10.1117/12.2182032

KEYWORDS: Plasmas, Neon, Laser systems engineering, Ions, Argon, Gases, Pulsed laser operation, Extreme ultraviolet, Picosecond phenomena, X-rays

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Proceedings Article | 12 May 2015 Paper

Paper

Compact laser produced plasma soft x-ray source for contact microscopy experiments

Mesfin Ayele, Joanna Czwartos, Daniel Adjei, Przemysław Wachulak, Andrzej Bartnik, Łukasz Wegrzynski, Mirosław Szczurek, Roman Jarocki, Henryk Fiedorowicz

Proceedings Volume 9511, 95110L (2015) https://doi.org/10.1117/12.2182713

KEYWORDS: X-rays, X-ray microscopy, Plasma, Microscopy, X-ray sources, Sensors, X-ray imaging, Pulsed laser operation, Optical filters, Gas lasers

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Proceedings Article | 12 May 2015 Paper

Paper

Nanoscale imaging and optimization of a compact "water window" SXR microscope

Alfio Torrisi, Przemyslaw Wachulak, Fahad Nawaz, Andrzej Bartnik, Jerzy Kostecki, Lukasz Węgrzyński, Roman Jarocki, Mirosław Szczurek, Henryk Fiedorowicz

Proceedings Volume 9510, 95100N (2015) https://doi.org/10.1117/12.2181436

KEYWORDS: Signal to noise ratio, Microscopes, Sensors, Nitrogen, Spatial resolution, CCD cameras, Plasma, Zone plates, Image quality, CCD image sensors

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Proceedings Article | 5 December 2014 Paper

Paper

Laser-plasma SXR/EUV sources: adjustment of radiation parameters for specific applications

A. Bartnik, H. Fiedorowicz, T. Fok, R. Jarocki, J. Kostecki, A. Szczurek, M. Szczurek, P. Wachulak, Ł. Węgrzyński

Proceedings Volume 9441, 94410R (2014) https://doi.org/10.1117/12.2084793

KEYWORDS: Plasma, Extreme ultraviolet, Xenon, Mirrors, Laser systems engineering, Pulsed laser operation, Krypton, X-rays, Gold, Argon

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Proceedings Article | 27 September 2013 Paper

Paper

Development and applications of x-ray lasers at PALS Centre

M. Kozlova, J. Nejdl, A. Klisnick, A. Le Marec, L. Meng, F. Tissandier, T. Fok, L. Wegrzynski, A. Bartnik, P. Wachulak, R. Jarocki, H. Fiedorowicz

Proceedings Volume 8849, 884904 (2013) https://doi.org/10.1117/12.2024526

KEYWORDS: X-ray lasers, Zinc, Laser systems engineering, Iodine, Plasma, Temporal coherence, Sapphire lasers, Amplifiers, Spatial coherence, Mirrors

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Proceedings Article | 3 May 2013 Paper

Paper

Water-window microscopy using compact, laser-plasma source based on Ar/He double stream gas-puff target

Przemyslaw Wachulak, Marcin Skorupka, Andrzej Bartnik, Jerzy Kostecki, Roman Jarocki, Mirosław Szczurek, Lukasz Wegrzynski, Tomasz Fok, Henryk Fiedorowicz

Proceedings Volume 8777, 877719 (2013) https://doi.org/10.1117/12.2021154

KEYWORDS: Signal to noise ratio, Microscopy, Spatial resolution, Plasma, Argon, Optical filters, X-ray microscopy, Microscopes, Extreme ultraviolet, Objectives

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Proceedings Article | 3 May 2013 Paper

Paper

EUV optics in photoionization experiments

Andrzej Bartnik, Przemysław Wachulak, Henryk Fiedorowicz, Tomasz Fok, Roman Jarocki, Jerzy Kostecki, Anna Szczurek, Mirosław Szczurek, Ladislav Pina, Libor Sveda

Proceedings Volume 8777, 87771H (2013) https://doi.org/10.1117/12.2018422

KEYWORDS: Extreme ultraviolet, Plasmas, Neon, Gases, Ions, Argon, Pulsed laser operation, Chemical species, EUV optics, Grazing incidence

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Proceedings Article | 3 May 2013 Paper

Paper

EUV induced ablation and surface modification of poly(vinylidene fluoride) irradiated in vacuum or gaseous environment

Andrzej Bartnik, Wojciech Lisowski, Janusz Sobczak, Przemyslaw Wachulak, Boguslaw Budner, Barbara Korczyc, Henryk Fiedorowicz, Jerzy Kostecki

Proceedings Volume 8777, 877708 (2013) https://doi.org/10.1117/12.2021152

KEYWORDS: Extreme ultraviolet, Polymers, Nitrogen, Ferroelectric polymers, Chemical species, Fluorine, Molecules, Ionization, Photons, X-rays

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Proceedings Article | 11 December 2012 Paper

Paper

Lab-scale EUV nano-imaging employing a gas-puff-target source: image quality versus plasma radiation characteristics

Przemyslaw Wachulak, Andrzej Bartnik, Henryk Fiedorowicz

Proceedings Volume 8678, 867807 (2012) https://doi.org/10.1117/12.2006090

KEYWORDS: Extreme ultraviolet, Plasma, Spatial resolution, Xenon, Argon, Microscopes, Zone plates, Microscopy, Image resolution, Mirrors

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Proceedings Article | 19 May 2011 Paper

Paper

EUV: induced ablation and surface modifications of solids

A. Bartnik, H. Fiedorowicz, R. Jarocki, J. Kostecki, M. Szczurek, A. Szczurek, P. Wachulak

Proceedings Volume 8077, 80770H (2011) https://doi.org/10.1117/12.887491

KEYWORDS: Polymers, Extreme ultraviolet, Positron emission tomography, Molecules, Oxygen, Polymethylmethacrylate, Carbon, Scanning electron microscopy, Solids, Extreme ultraviolet lithography

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Proceedings Article | 15 December 2010 Paper

Paper

Nanometer scale imaging with table top extreme ultraviolet sources

Przemyslaw Wachulak, Richard Sandberg, Artak Isoyan, Lukasz Urbanski, Andrzej Bartnik, Randy Bartels, Carmen Menoni, Henryk Fiedorowicz, Jorge Rocca, Mario Marconi

Proceedings Volume 7746, 774609 (2010) https://doi.org/10.1117/12.880340

KEYWORDS: Extreme ultraviolet, Holograms, Spatial resolution, Diffraction, Image resolution, Holography, 3D image reconstruction, Photoresist materials, Photomasks, Microscopes

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Proceedings Article | 26 February 2010 Paper

Paper

Nanostructured polymers by a compact laser plasma EUV source

Henryk Fiedorowicz, Andrzej Bartnik, Roman Jarocki, Jerzy Kostecki, Miroslaw Szczurek

Proceedings Volume 7586, 75860G (2010) https://doi.org/10.1117/12.841682

KEYWORDS: Polymers, Extreme ultraviolet, Scanning electron microscopy, Plasma, Photomicroscopy, Laser processing, Photons, Nanostructures, Extreme ultraviolet lithography, Laser ablation

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Proceedings Article | 18 February 2010 Paper

Paper

Recent advancements in technology of compact laser plasma EUV sources

Henryk Fiedorowicz, Andrzej Bartnik, Roman Jarocki, Jerzy Kostecki, Ladislav Pina, Mirosław Szczurek, Przemysław Wachulak

Proceedings Volume 7584, 75840U (2010) https://doi.org/10.1117/12.841715

KEYWORDS: Extreme ultraviolet, Plasma, Mirrors, Laser applications, Laser processing, Polymers, Laser development, Nd:YAG lasers, Xenon, Eye

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Proceedings Article | 18 May 2009 Paper

Paper

Surface changes of solids under intense EUV irradiation using a laser-plasma source

Andrzej Bartnik, Henryk Fiedorowicz, Roman Jarocki, Jerzy Kostecki, Rafal Rakowski, Miroslaw Szczurek

Proceedings Volume 7361, 73610C (2009) https://doi.org/10.1117/12.820744

KEYWORDS: Extreme ultraviolet, Polymers, Plasma, Grazing incidence, Polymethylmethacrylate, Laser ablation, Mirrors, Scanning electron microscopy, Positron emission tomography, Solids

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Proceedings Article | 20 November 2008 Paper

Paper

Design and study of efficiency of EUV condensor for illumination of large samples

L. Sveda, L. Pina, V. Semencova, A. Inneman, A. Bartnik, H. Fiedorowicz, R. Rakowski

Proceedings Volume 7141, 71410P (2008) https://doi.org/10.1117/12.822370

KEYWORDS: Mirrors, Silver, Molybdenum, Manufacturing, Extreme ultraviolet, Lithographic illumination, Sensors, Plasma, Optics manufacturing, Lithography

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Proceedings Article | 20 November 2008 Paper

Paper

Laser plasma sources of soft x-rays and extreme ultraviolet (EUV) for technology, biomedical, and metrology applications

Andrzej Bartnik, Henryk Fiedorowicz, Roman Jarocki, Jerzy Kostecki, Rafał Rakowski, Magdalena Sawicka, Mirosław Szczurek

Proceedings Volume 7141, 714105 (2008) https://doi.org/10.1117/12.822350

KEYWORDS: Extreme ultraviolet, Plasma, Mirrors, Polymers, Grazing incidence, Xenon, Micromachining, X-rays, Argon, Laser applications

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Proceedings Article | 17 September 2007 Paper

Paper

Micro- and nanoprocessing of organic polymers using a compact laser plasma EUV source equipped with EUV optical systems

Henryk Fiedorowicz, Andrzej Bartnik, Krzysztof Jakubczak, Roman Jarocki, Jerzy Kostecki, Ladislav Pina, Rafał Rakowski, Anna Szczurek, Mirosław Szczurek

Proceedings Volume 6703, 67030C (2007) https://doi.org/10.1117/12.735588

KEYWORDS: Extreme ultraviolet, Polymers, Plasma, Mirrors, Laser ablation, Photons, Multilayers, Coating, Nanoprocess, Ultraviolet radiation

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Proceedings Article | 11 May 2007 Paper

Paper

Response of inorganic materials to laser-plasma EUV radiation focused with a lobster eye collector

Andrzej Bartnik, Henryk Fiedorowicz, Roman Jarocki, Jerzy Kostecki, Miroslaw Szczurek, Radka Havlikova, Ladislav Pína, Libor Švéda, Adolf Inneman

Proceedings Volume 6586, 65860A (2007) https://doi.org/10.1117/12.722749

KEYWORDS: Extreme ultraviolet, Optical filters, Visible radiation, Mirrors, Zirconium, Plasma, Xenon, Glasses, Eye, Luminescence

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Proceedings Article | 26 April 2007 Paper

Paper

Micro- and nanoprocessing of organic polymers using a laser plasma XUV source

Henryk Fiedorowicz, Andrzej Bartnik, Roman Jarocki, Libor Juha, Jerzy Kostecki, Rafal Rakowski, Miroslaw Szczurek

Proceedings Volume 6346, 63461H (2007) https://doi.org/10.1117/12.738157

KEYWORDS: Extreme ultraviolet, Plasma, Polymers, Polymethylmethacrylate, Pulsed laser operation, Xenon, X-rays, Nanoprocess, Nd:YAG lasers, Gas lasers

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Proceedings Article | 23 January 2007 Paper

Paper

Application of laser plasma soft x-ray and EUV sources in micro- and nanotechnology

Henryk Fiedorowicz, Andrzej Bartnik, Krzysztof Jakubczak, Roman Jarocki, Libor Juha, Jerzy Kostecki, Ladislav Pina, Rafał Rakowski, Mirosław Szczurek

Proceedings Volume 6598, 65980G (2007) https://doi.org/10.1117/12.726547

KEYWORDS: Extreme ultraviolet, X-rays, Plasma, Polymers, Polymethylmethacrylate, X-ray sources, Laser ablation, X-ray lasers, Photons, Pulsed laser operation

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Proceedings Article | 29 August 2006 Paper

Paper

EUV radiation from gas-puff laser plasma focused by multi-foil optics

L. Pina, A. Bartnik, H. Fiedorowicz, R. Havlikova, R. Hudec, A. Inneman, K. Jakubczak, V. Semencova, L. Sveda

Proceedings Volume 6317, 631705 (2006) https://doi.org/10.1117/12.684031

KEYWORDS: Mirrors, Extreme ultraviolet, Visible radiation, Plasma, Geometrical optics, Solids, Photons, Optics manufacturing, Crystals, Glasses

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Proceedings Article | 12 October 2005 Paper

Paper

Wide band laser-plasma soft x-ray source using a gas puff target for direct photoetching of polymers

Andrzej Bartnik, Henryk Fiedorowicz, Roman Jarocki, Jerzy Kostecki, Rafał Rakowski, Mirosław Szczurek

Proceedings Volume 5958, 595815 (2005) https://doi.org/10.1117/12.622119

KEYWORDS: X-rays, Plasma, Xenon, Polymers, X-ray sources, Polymethylmethacrylate, Krypton, Argon, Micromachining, Laser ablation

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Proceedings Article | 12 October 2005 Paper

Paper

Spectral and spatial measurements of a laser-produced plasma EUV source for 13.5 nm based on a double stream Xe/He gas puff target

R. Rakowski, A. Bartnik, H. Fiedorowicz, R. Jarocki, J. Kostecki, J. Krzywiński, J. Mikołajczyk, L. Ryć, M. Szczurek, P. Wachulak

Proceedings Volume 5958, 59582W (2005) https://doi.org/10.1117/12.622218

KEYWORDS: Plasma, Xenon, Extreme ultraviolet, Pulsed laser operation, Spectrographs, Charge-coupled devices, Nd:YAG lasers, Geographic information systems, Helium, Coded apertures

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Proceedings Article | 22 September 2005 Paper

Paper

Large laser sparks for laboratory simulation of high-energy-density events in planetary atmospheres

Dagmar Babankova, Libor Juha, Svatopluk Civias, Michal Bittner, Jaroslav Cihelka, Andrzej Bartnik, Henryk Fiedorowicz, Janusz Mikolajczyk, Leszek Ryc, Miroslav Pfeifer, Jiri Skala, Jiri Ullschmied

Proceedings Volume 5906, 590614 (2005) https://doi.org/10.1117/12.618407

KEYWORDS: Plasma, Carbon monoxide, Gases, Atmospheric plasma, Earth's atmosphere, High power lasers, Molecular lasers, Molecules, Pulsed laser operation, Absorption

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Proceedings Article | 13 September 2005 Paper

Paper

Elongated high-density gas puff target for experiments on laser-driven x-ray lasers

Henryk Fiedorowicz, Andrzej Bartnik, Roman Jarocki, Jerzy Kostecki, Rafal Rakowski, Miroslaw Szczurek

Proceedings Volume 5919, 591903 (2005) https://doi.org/10.1117/12.615884

KEYWORDS: X-ray lasers, X-rays, X-ray characterization, Gas lasers, Xenon, Plasma, Solids, Electromagnetism, Optical filters, Optoelectronics

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Proceedings Article | 31 August 2005 Paper

Paper

Compact and debris-free laser plasma soft x-ray source based on a gas puff target

H. Fiedorowicz, A. Bartnik, R. Jarocki, J. Kostecki, J. Krzywinski, R. Rakowski, M. Szczurek

Proceedings Volume 5918, 59180G (2005) https://doi.org/10.1117/12.615872

KEYWORDS: X-rays, Plasma, X-ray sources, Pulsed laser operation, Xenon, X-ray lasers, Laser applications, Argon, Helium, Electromagnetism

Read Abstract +

Proceedings Article | 27 August 2005 Paper

Paper

Micromachining of organic polymers by direct photo-etching using a compact laser plasma soft x-ray source

H. Fiedorowicz, A. Bartnik, R. Jarocki, J. Kostecki, R. Rakowski, M. Szczurek

Proceedings Volume 5931, 59310H (2005) https://doi.org/10.1117/12.615890

KEYWORDS: X-rays, Plasma, X-ray sources, Polymers, Micromachining, Nd:YAG lasers, Polymethylmethacrylate, Laser ablation, Xenon, Scanning electron microscopy

Read Abstract +

SPIE Journal Paper | 1 July 2005

Short-wavelength ablation of molecular solids: pulse duration and wavelength effects

Libor Juha, Michal Bittner, Dagmar Chvostova, Josef Krasa, Michaela Kozlov, Miroslav Pfeifer, Jiri Polan, Ansgar Präg, Bedrich Rus, Michal Stupka, Josef Feldhaus, Vit Letal, Zdenek Otcenasek, Jacek Krzywinski, Robert Nietubye, Jerzy Pelka, Andrzej Andrejczuk, Ryszard Sobierajski, Leszek Ryc, Frederick Boody, Henryk Fiedorowicz, Andrzej Bartnik, Janusz Mikolajczyk, Rafal Rakowski, Pavel Kubát, Ladislav Pína, Martin Horváth, Michael Grisham, Georgiy Vaschenko, Carmen Menoni, Jorge Rocca

JM3, Vol. 4, Issue 03, 033007, (July 2005) https://doi.org/10.1117/12.10.1117/1.2037467

KEYWORDS: Laser ablation, Polymethylmethacrylate, Extreme ultraviolet, Free electron lasers, Solids, Pulsed laser operation, X-rays, Signal attenuation, Photons, Absorption

Read Abstract +

Proceedings Article | 27 April 2005 Paper

Paper

Passively Q-switched nanosecond pulse-train Nd:YAG laser system

Miroslaw Szczurek, Roman Jarocki, Andrzej Bartnik, Henryk Fiedorowicz, Jerzy Kostecki, Rafal Rakowski, Anna Szczurek

Proceedings Volume 5707, (2005) https://doi.org/10.1117/12.589125

KEYWORDS: Pulsed laser operation, Nd:YAG lasers, Oscillators, Laser systems engineering, Q switched lasers, Amplifiers, Laser energy, Q switches, Telescopes, Laser scattering

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Proceedings Article | 23 March 2005 Paper

Paper

Photo-etching of organic polymers using a laser plasma x-ray source based on a gas puff target irradiated with the PALS facility

Henryk Fiedorowicz, Andrzej Bartnik, Michal Bittner, Libor Juha, Josef Krasa, Pavel Kubat, Janusz Mikolajczyk, Rafal Rakowski

Proceedings Volume 5777, (2005) https://doi.org/10.1117/12.611333

KEYWORDS: X-rays, Polymers, Plasma, X-ray sources, Polymethylmethacrylate, Micromachining, Extreme ultraviolet, Aluminum, Synchrotron radiation, Xenon

Read Abstract +

Proceedings Article | 10 November 2004 Paper

Paper

Short-wavelength ablation of solids: pulse duration and wavelength effects

Libor Juha, Michal Bittner, Dagmar Chvostova, Vit Letal, Josef Krasa, Zdenek Otcenasek, Michaela Kozlova, Jiri Polan, Ansgar Prag, Bedrich Rus, Michal Stupka, Jacek Krzywinski, Andrzej Andrejczuk, Jerzy Pelka, Ryszard Sobierajski, Leszek Ryc, Josef Feldhaus, Frederick Boody, Henryk Fiedorowicz, Andrzej Bartnik, Janusz Mikolajczyk, Rafal Rakowski, P. Kubat, Ladislav Pina, Michael Grisham, Georgiy Vaschenko, Carmen Menoni, Jorge Rocca

Proceedings Volume 5534, (2004) https://doi.org/10.1117/12.560413

KEYWORDS: Laser ablation, Polymethylmethacrylate, Extreme ultraviolet, Free electron lasers, Pulsed laser operation, Photons, X-rays, Plasma, Signal attenuation, Etching

Read Abstract +

Proceedings Article | 12 December 2003 Paper

Paper

X-ray spectroscopic study on femto- and pico-second laser irradiated solid and gaseous targets

Masayuki Suzuki, Hiroyuki Daido, Fumiaki Matsuoka, Etsuya Yanase, Mamiko Nishiuchi, Keiko Suto, A. Sasaki, Koichi Yamakawa, Tetsuya Kawachi, Keisuke Nagashima, Takatsugu Oketa, Takeyoshi Nakayama, Ingo Uschmann, Eckhart Foerster, Henryk Fiedorowicz

Proceedings Volume 5228, (2003) https://doi.org/10.1117/12.536791

KEYWORDS: X-rays, Pulsed laser operation, Plasma, Spectroscopy, Laser energy, Krypton, Nitrogen, Oxygen, Ions, Xenon

Read Abstract +

Proceedings Article | 10 November 2003 Paper

Paper

Generation of soft x-ray radiation from a gas puff target irradiated with a high-power laser pulse

Henryk Fiedorowicz

Proceedings Volume 5120, (2003) https://doi.org/10.1117/12.515833

KEYWORDS: X-rays, X-ray lasers, Plasma, High power lasers, Xenon, Argon ion lasers, Ions, Gas lasers, Laser development, X-ray sources

Read Abstract +

Proceedings Article | 6 October 2003 Paper

Paper

Generation of soft x-rays and extreme-ultraviolet (EUV) radiation using a laser-irradiated gas puff target

Henryk Fiedorowicz

Proceedings Volume 5229, (2003) https://doi.org/10.1117/12.520124

KEYWORDS: X-rays, Extreme ultraviolet, X-ray lasers, Plasma, Gas lasers, Xenon, Ions, Solids, Optoelectronics, High power lasers

Read Abstract +

Proceedings Article | 16 June 2003 Paper

Paper

Compact laser plasma EUV source based on a gas puff target for metrology

Henryk Fiedorowicz, Andrzej Bartnik, Roman Jarocki, Jerzy Kostecki, Janusz Mikolajczyk, Rafal Rakowski, Miroslaw Szczurek

Proceedings Volume 5037, (2003) https://doi.org/10.1117/12.482749

KEYWORDS: Extreme ultraviolet, Plasma, Spectrometers, Xenon, X-rays, Pulsed laser operation, Nd:YAG lasers, Photodiodes, Laser metrology, Metrology

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Proceedings Article | 1 April 2003 Paper

Paper

Spectral measurement of soft x-ray and EUV emissions from a laser-irradiated gas puff target using a transmission grating spectrometer

Henryk Fiedorowicz, Andrzej Bartnik, Roman Jarocki, Jerzy Kostecki, Jacek Krzywinski, Janusz Mikolajczyk, Rafal Rakowski, Miroslaw Szczurek, Janusz Wawer

Proceedings Volume 5064, (2003) https://doi.org/10.1117/12.501394

KEYWORDS: X-rays, Extreme ultraviolet, Spectroscopy, Laser applications, Pulsed laser operation, Gas lasers, Photoemission spectroscopy, Neodymium glass lasers, Laser development, X-ray sources

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Proceedings Article | 1 July 2002 Paper

Paper

Laser plasma radiation sources based on a laser-irradiated gas puff target for x-ray and EUV lithography technologies

Henryk Fiedorowicz, Andrzej Bartnik, Roman Jarocki, Jerzy Kostecki, Rafal Rakowski, Miroslaw Szczurek

Proceedings Volume 4688, (2002) https://doi.org/10.1117/12.472337

KEYWORDS: Extreme ultraviolet, X-rays, Plasma, X-ray lithography, Gas lasers, Laser irradiation, Extreme ultraviolet lithography, Laser applications, X-ray technology, Pulsed laser operation

Read Abstract +

Proceedings Article | 12 December 2001 Paper

Paper

Recent x-ray laser experiments on the COMET facility

James Dunn, Raymond Smith, Joseph Nilsen, Jim Hunter, Troy Barbee, Vyacheslav Shlyaptsev, Jorge Filevich Chamatropulos, Jorge Rocca, Mario Marconi, Henryk Fiedorowicz, Andrzej Bartnik

Proceedings Volume 4505, (2001) https://doi.org/10.1117/12.450575

KEYWORDS: X-ray lasers, Plasma, Picosecond phenomena, Mirrors, Palladium, X-rays, Comets, Pulsed laser operation, Interferometers, Diffraction gratings

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Proceedings Article | 12 December 2001 Paper

Paper

Demonstration of a neon-like argon x-ray laser using a short-pulse laser-irradiated gas puff target

Henryk Fiedorowicz, Andrzej Bartnik, James Dunn, Jim Hunter, Joseph Nilsen, Albert Osterheld, Rafal Rakowski, Vyacheslav Shlyaptsev, Raymond Smith, Miroslaw Szczurek

Proceedings Volume 4505, (2001) https://doi.org/10.1117/12.450597

KEYWORDS: X-ray lasers, Picosecond phenomena, Plasmas, Argon ion lasers, Argon, Solids, Pulsed laser operation, 3D acquisition, Gas lasers, Ions

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Proceedings Article | 12 December 2001 Paper

Paper

Transient and capillary collisional x-ray lasers

Vyacheslav Shlyaptsev, James Dunn, Kevin Fournier, Stephen Moon, Albert Osterheld, Jorge Rocca, F. Detering, Wojciech Rozmus, J. Matte, Henryk Fiedorowicz, Andrzej Bartnik, Michael Kanouff

Proceedings Volume 4505, (2001) https://doi.org/10.1117/12.450598

KEYWORDS: X-ray lasers, Plasma, Picosecond phenomena, Capillaries, Pulsed laser operation, Ionization, Ions, Photonic integrated circuits, Plasma diagnostics, Absorption

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Proceedings Article | 6 December 2001 Paper

Paper

Investigation of soft x-ray emission in the water window for microscopy using a double-stream gas puff target irradiated with the Prague Asterix Laser System (PALS)

Henryk Fiedorowicz, Andrzej Bartnik, Martin Horvath, Libor Juha, Karel Jungwirth, Bozena Kralikova, Josef Krasa, Tomas Mocek, Miroslav Pfeifer, Ladislav Pina, Jiri Skala, Jiri Ullschmied, Janusz Wawer

Proceedings Volume 4502, (2001) https://doi.org/10.1117/12.449852

KEYWORDS: X-rays, X-ray microscopy, X-ray imaging, Nitrogen, Zone plates, Pulsed laser operation, Plasma, Laser energy, Photodiodes, Laser systems engineering

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Proceedings Article | 14 November 2001 Paper

Paper

Characterization and optimization of a laser-produced x-ray source with a double-stream gas puff target

Henryk Fiedorowicz, Andrzej Bartnik, Roman Jarocki, Jerzy Kostecki, Jacek Krzywinski, Rafal Rakowski, Miroslaw Szczurek

Proceedings Volume 4504, (2001) https://doi.org/10.1117/12.448451

KEYWORDS: X-rays, Extreme ultraviolet, Laser applications, X-ray sources, Photodiodes, Pulsed laser operation, Neodymium glass lasers, Silicon, Laser development, Laser energy

Read Abstract +

Proceedings Article | 20 August 2001 Paper

Paper

Characterization of a laser-produced x-ray source with a double-stream gas puff target for x-ray and EUV lithography

Henryk Fiedorowicz, Andrzej Bartnik, Hiroyuki Daido, Roman Jarocki, Rafal Rakowski, Masayuki Suzuki, Miroslaw Szczurek, Susumu Yamagami

Proceedings Volume 4343, (2001) https://doi.org/10.1117/12.436680

KEYWORDS: X-rays, Extreme ultraviolet, Solids, Plasma, Xenon, Argon, X-ray lithography, Laser development, Nd:YAG lasers, Sensors

Read Abstract +

Proceedings Article | 23 April 2001 Paper

Paper

Soft x-ray emission from a double-stream gas puff target irradiated by a nanosecond laser pulse

Andrzej Bartnik, Henryk Fiedorowicz, Rafal Rakowski, Miroslaw Szczurek, Fred Bijkerk, R. Bruijn, H. Fledderus

Proceedings Volume 4424, (2001) https://doi.org/10.1117/12.425644

KEYWORDS: Plasma, X-rays, Xenon, Argon, Helium, Pulsed laser operation, Photodiodes, Mirrors, Optical filters, Coded apertures

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Proceedings Article | 23 April 2001 Paper

Paper

Investigation of an EUV emission from a double-stream gas puff target irradiated by a nanosecond laser pulse

Andrzej Bartnik, Henryk Fiedorowicz, Susumu Yamagami, Masayuki Suzuki, Hiroyuki Daido

Proceedings Volume 4424, (2001) https://doi.org/10.1117/12.425645

KEYWORDS: Plasma, Helium, Extreme ultraviolet, Pulsed laser operation, Xenon, X-rays, Absorption, Gases, Krypton, Solids

Read Abstract +

Proceedings Article | 2 November 2000 Paper

Paper

Laser systems for generation of x-ray radiation

Miroslaw Szczurek, Andrzej Bartnik, Henryk Fiedorowicz, Roman Jarocki, Jerzy Kostecki

Proceedings Volume 4238, (2000) https://doi.org/10.1117/12.405996

KEYWORDS: X-rays, Laser systems engineering, Plasma, Pulsed laser operation, X-ray lasers, Ions, Laser applications, X-ray optics, Laser development, Excimer lasers

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Proceedings Article | 21 July 2000 Paper

Paper

Characterization of a novel double-gas-jet laser plasma EUV source

Rene de Bruijn, Andrzej Bartnik, H. Fledderus, Henryk Fiedorowicz, Petra Hegeman, Raluca Constantinescu, Fred Bijkerk

Proceedings Volume 3997, (2000) https://doi.org/10.1117/12.390050

KEYWORDS: Extreme ultraviolet, Plasma, Xenon, Pulsed laser operation, Hydrogen, Diodes, Optical filters, Absorption, Mirrors, Argon

Read Abstract +

Proceedings Article | 23 March 2000 Paper

Paper

Generation of laser plasma resulting from interaction of a nanosecond laser pulse with a gas puff target

Henryk Fiedorowicz, Andrzej Bartnik, Igor Glazyrin, Oleg Diyankov, Roman Jarocki, Igor Krasnogorov, Serge Koshelev, Jerzy Kostecki, Peter Loboda, Miroslaw Szczurek

Proceedings Volume 3935, (2000) https://doi.org/10.1117/12.380805

KEYWORDS: Plasma, Pulsed laser operation, X-rays, Gas lasers, Absorption, Numerical simulations, Laser applications, High power lasers, X-ray imaging, Neodymium glass lasers

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Proceedings Article | 11 January 2000 Paper

Paper

Characterization of laser-produced gas-puff plasmas for soft x-ray projection lithography

Masayuki Suzuki, Hiroyuki Daido, Il Choi, Huajing Tang, Susumu Yamagami, Hideo Nagatomo, Andrzej Bartnik, Henryk Fiedorowicz, Wei Yu, Takeyoshi Nakayama

Proceedings Volume 3886, (2000) https://doi.org/10.1117/12.375161

KEYWORDS: X-rays, Plasmas, X-ray lithography, Gas lasers, Krypton, Xenon, Projection lithography, Nd:YAG lasers, Oxygen, X-ray technology

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Proceedings Article | 23 November 1999 Paper

Paper

Characterization and optimization of a laser-produced x-ray source with a gas puff target

Henryk Fiedorowicz, Andrzej Bartnik, Roman Jarocki, Rafal Rakowski, Miroslaw Szczurek, Hiroyuki Daido, Noriyuki Sakaya, Masayuki Suzuki, Hideo Nagatomo, Huajing Tang, Il Choi, Yusuke Tohyama, Susumu Yamagami, Takeyoshi Nakayama

Proceedings Volume 3767, (1999) https://doi.org/10.1117/12.371110

KEYWORDS: X-rays, Xenon, Gas lasers, Plasmas, X-ray imaging, Chlorine, Liquids, Nitrogen, Nd:YAG lasers, Helium

Read Abstract +

Proceedings Article | 25 June 1999 Paper

Paper

Emission from a gas puff target irradiated with a Nd:YAG laser for EUV and x-ray lithography

Henryk Fiedorowicz, Hiroyuki Daido, Andrzej Bartnik, Noriyuki Sakaya, Masayuki Suzuki, Viliam Kmetik, Miroslaw Szczurek, Thomas Wilhein

Proceedings Volume 3676, (1999) https://doi.org/10.1117/12.351112

KEYWORDS: X-rays, Plasmas, Xenon, Gas lasers, X-ray lithography, Krypton, Nitrogen, Nd:YAG lasers, Argon, Spectrometers

Read Abstract +

Proceedings Article | 1 November 1997 Paper

Paper

Soft x-ray radiation from plasma and microcapillary waveguides

Anatoly Morozov, Yan Ping, Szymon Suckewer, Andrzej Bartnik, Henryk Fiedorowicz

Proceedings Volume 3156, (1997) https://doi.org/10.1117/12.293381

KEYWORDS: Plasma, X-rays, Pulsed laser operation, X-ray lasers, Waveguides, Nitrogen, Absorption, Spectroscopy, Ions, Axicons

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Proceedings Article | 1 November 1997 Paper

Paper

Formation of elongated laser sparks in gas puff targets by nanosecond laser pulses

Andrzej Bartnik, Henryk Fiedorowicz, Jerzy Kostecki, Anatoly Morozov, Szymon Suckewer, Miroslaw Szczurek

Proceedings Volume 3156, (1997) https://doi.org/10.1117/12.284828

KEYWORDS: Pulsed laser operation, Plasma, Laser scattering, Axicons, Spherical lenses, Nitrogen, CCD cameras, Laser energy, Gas lasers, Spectroscopy

Read Abstract +

Proceedings Article | 14 October 1997 Paper

Paper

High-resolution x-ray spectroscopy of multicharged argon and krypton ions using a laser-produced x-ray source with a gas puff target

Andrzej Bartnik, Vladimir Dyakin, Anatoly Faenov, Henryk Fiedorowicz, Roman Jarocki, Joseph Nilsen, Albert Osterheld, Igor Skobelev, Miroslaw Szczurek

Proceedings Volume 3157, (1997) https://doi.org/10.1117/12.283995

KEYWORDS: Argon, Plasma, X-rays, Krypton, Ions, Crystals, Satellites, Spectroscopy, Gas lasers, Laser crystals

Read Abstract +

A hot and dense plasma can be produced by high-power laser irradiation of a high-pressure gas puff target. The plasma emits strong x-ray radiation in low photon-energy range (soft x-rays and XUV radiation) and is considered to be used as a debrisless laser-produced x-ray source. It was shown that the laser-irradiated gas puff plasma is an ideal source for the high-resolution spectroscopic studies of complex spectra of the multicharged ions. This paper reports our investigations of x-ray spectra of heliumlike argon and neonlike krypton ions. The gas puff targets were created with the use of a specially designed high-pressure solenoid valve operating at a backing pressure up to 15 at and quipped with a sonic-type circular nozzle of 0.5 mm in diameter. Parameters of the gas puff targets were measured using x-ray shadowgraphy and laser interferometry. To irradiate the gas puff targets we have used a Nd:glass laser, which generates 10 J pulses in 1 ns FWHM. The laser beam was focused onto the gas puff target perpendicularly in respect to the flow of gas using an aspherical lens. The diameter of a laser beam in the focus were about 100 micrometers , what ensured the radiation power density to be of order of 10¹⁴ W/cm². To measure x-ray spectra emitted by a laser-irradiated gas puff target we have used a simple focusing crystal spectrographs with a mica crystal curved into a spherical surface of radius R equals 100 mm. The spectra were recorded on Kodak RAR 2495 x-ray commercial film. The high resolving power of the spectrograph of about (lambda) /(Delta) (lambda) equals 10000 permitted high-precision wavelength spectral measurements. The measured x-ray spectra have the small spectra width of the observed lines associated with the low expansion velocity of the laser- irradiated gas puff plasma. Dielectronic sodiumlike satellites to neonlike krypton resonance lines have measured for the first time. High-resolution spectra of heliumlike argon were also obtained. The measured spectra have been used for diagnosing the plasma parameters.

Proceedings Article | 14 August 1997 Paper

Paper

X-ray lasers: status and perspectives

Henryk Fiedorowicz

Proceedings Volume 3186, (1997) https://doi.org/10.1117/12.280483

KEYWORDS: X-ray lasers, Laser applications, Physics, Laser development, Laser irradiation, Gas lasers

Read Abstract +

Proceedings Article | 1 September 1996 Paper

Paper

Investigations of x-ray emission from a laser-irradiated gas puff target

Henryk Fiedorowicz

Proceedings Volume 2778, 2778G7 (1996) https://doi.org/10.1117/12.2316272

Read Abstract +

Proceedings Article | 27 May 1996 Paper

Paper

Debrisless laser-produced x-ray source with a gas puff target

Henryk Fiedorowicz, Andrzej Bartnik, Jerzy Kostecki, Miroslaw Szczurek

Proceedings Volume 2723, (1996) https://doi.org/10.1117/12.240482

KEYWORDS: X-rays, Plasma, Xenon, Solids, Gas lasers, Laser irradiation, Iron, X-ray detectors, Tellurium, Target detection

Read Abstract +

Proceedings Article | 25 September 1995 Paper

Paper

X-ray laser experiments using laser-irradiated gas puff targets at the ASTERIX IV facility

Henryk Fiedorowicz, Andrzej Bartnik, Miroslaw Szczurek, Ernst Fill, Yuelin Li, Peixiang Lu, Georg Pretzler

Proceedings Volume 2520, (1995) https://doi.org/10.1117/12.221659

KEYWORDS: Plasma, X-rays, X-ray lasers, Gas lasers, Laser irradiation, Xenon, X-ray imaging, Argon, Pulsed laser operation, Krypton

Read Abstract +

Proceedings Article | 18 September 1995 Paper

Paper

Generation of soft x-ray radiation by laser irradiation of a gas puff xenon target

Henryk Fiedorowicz, Andrzej Bartnik, Miroslaw Szczurek, Piotr Parys, Peter Celliers, Luiz Da Silva, Stanley Mrowka, C. Brent Dane, Dennis Matthews, Joseph Abate

Proceedings Volume 2523, (1995) https://doi.org/10.1117/12.220997

KEYWORDS: X-rays, Xenon, Plasmas, Pulsed laser operation, Neodymium glass lasers, Gas lasers, X-ray detectors, Laser irradiation, X-ray imaging, X-ray lithography

Read Abstract +

Proceedings Article | 1 February 1994 Paper

Paper

X-ray generation from Nd laser-irradiated gas puff targets

Henryk Fiedorowicz, Andrzej Bartnik, Zbigniew Patron, Piotr Parys

Proceedings Volume 2015, (1994) https://doi.org/10.1117/12.168007

KEYWORDS: X-rays, Plasma, Gas lasers, Laser irradiation, Krypton, Pulsed laser operation, Neodymium, X-ray imaging, Solids, Fluorine

Read Abstract +

Showing 5 of 91 publications

Conference Committee Involvement (22)

EUV and X-ray Optics: Synergy between Laboratory and Space VIII

26 April 2023 | Prague, Czech Republic

Compact Radiation Sources from EUV to Gamma-rays: Development and Applications

25 April 2023 | Prague, Czech Republic

Optics Damage and Materials Processing by EUV/X-ray Radiation (XDam8)

24 April 2023 | Prague, Czech Republic

EUV and X-ray Optics, Sources, and Instrumentation

19 April 2021 | Online Only, Czech Republic

EUV and X-ray Optics: Synergy between Laboratory and Space

3 April 2019 | Prague, Czech Republic

Optics Damage and Materials Processing by EUV/X-ray Radiation (XDam7)

1 April 2019 | Prague, Czech Republic

EUV and X-ray Optics: Synergy between Laboratory and Space

26 April 2017 | Prague, Czech Republic

Damage to VUV, EUV, and X-ray Optics (XDam6)

24 April 2017 | Prague, Czech Republic

Eleventh Symposium on Laser Technology

28 September 2016 | Jastarnia, Poland

Damage to VUV, EUV, and X-ray Optics V (XDam5)

15 April 2015 | Prague, Czech Republic

EUV and X-ray Optics: Synergy between Laboratory and Space

13 April 2015 | Prague, Czech Republic

XIX Polish-Slovak-Czech Optical Conference on Wave and Quantum Aspects of Contemporary Optics

10 August 2014 | Jelenia Gora, Poland

Damage to VUV, EUV, and X-ray Optics IV

15 April 2013 | Prague, Czech Republic

Laser Technology 2012: Applications of Lasers

24 September 2012 | Szczecin, Poland

Laser Technology 2012: Progress in Lasers

24 September 2012 | Szczecin, Poland

Damage to VUV, EUV, and X-ray Optics (XDam3)

18 April 2011 | Prague, Czech Republic

Damage to VUV, EUV, and X-ray Optics II (XDam2)

22 April 2009 | Prague, Czech Republic

Ultrafast X-Ray Sources and Detectors

26 August 2007 | San Diego, California, United States

Damage to VUV, EUV & X-ray Optics

18 April 2007 | Prague, Czech Republic

Lasers and Applications

30 August 2005 | Warsaw, Poland

Laser-Generated, Synchrotron, and Other Laboratory X-Ray and EUV Sources, Optics, and Applications II

2 August 2005 | San Diego, California, United States

Laser-Generated and Other Laboratory X-Ray and EUV Sources, Optics, and Applications

4 August 2003 | San Diego, California, United States

Showing 5 of 22 Conference Committees

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