Electron-beam lithography data preparation based on multithreading MGS/PROXECCO

Hans Eichhorn; Melchior Lemke; Juergen Gramss; B. Buerger; Uwe Baetz; Nikola Belic; Hans Eisenmann

doi:10.1117/12.425088

9 April 2001 Electron-beam lithography data preparation based on multithreading MGS/PROXECCO

Hans Eichhorn, Melchior Lemke, Juergen Gramss, B. Buerger, Uwe Baetz, Nikola Belic, Hans Eisenmann

Proceedings Volume 4349, 17th European Conference on Mask Technology for Integrated Circuits and Microcomponents; (2001) https://doi.org/10.1117/12.425088
Event: 17th European Conference on Mask Technology for Integrated Circuits and Microcomponents, 2000, Munich, Germany

Abstract

This paper will highlight an enhanced MGS layout data post processor and the results of its industrial application. Besides the preparation of hierarchical GDS layout data, the processing of flat data has been drastically accelerated. The application of the Proximity Correction in conjunction with the OEM version of the PROXECCO was crowned with success for data preparation of mask sets featuring 0.25 micrometers /0.18 micrometers integration levels.

Citation Download Citation

Hans Eichhorn, Melchior Lemke, Juergen Gramss, B. Buerger, Uwe Baetz, Nikola Belic, and Hans Eisenmann "Electron-beam lithography data preparation based on multithreading MGS/PROXECCO", Proc. SPIE 4349, 17th European Conference on Mask Technology for Integrated Circuits and Microcomponents, (9 April 2001); https://doi.org/10.1117/12.425088

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available