Design and performance of a polysilicon surface micromachined microengine realized with arrays of asymmetrical electrothermal microactuators

Edward S. Kolesar Jr.; Matthew D. Ruff; Simon Y. Ko; Richard J. Wilks; Jeffrey T. Howard; Peter B. Allen; Josh M. Wilken; Jorge E. Bosch

doi:10.1117/12.425316

30 April 2001 Design and performance of a polysilicon surface micromachined microengine realized with arrays of asymmetrical electrothermal microactuators

Edward S. Kolesar Jr., Matthew D. Ruff, Simon Y. Ko, Richard J. Wilks, Jeffrey T. Howard, Peter B. Allen, Josh M. Wilken, Jorge E. Bosch

Author Affiliations +

Proceedings Volume 4407, MEMS Design, Fabrication, Characterization, and Packaging; (2001) https://doi.org/10.1117/12.425316
Event: Microelectronic and MEMS Technologies, 2001, Edinburgh, United Kingdom

Abstract

Several microactuator technologies have recently been investigated for positioning individual elements in large-scale microelectromechanical systems (MEMS). Electrostatic, magnetostatic, piezoelectric and thermal expansion are the most common modes of microactuator operation. This research focuses on the design and experimental characterization of two types of asymmetrical MEMS electrothermal microactuators. The motivation is to present a unified description of the behavior of the electrothermal microactuator so that it can be adapted to a variety of MEMS applications.

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Edward S. Kolesar Jr., Matthew D. Ruff, Simon Y. Ko, Richard J. Wilks, Jeffrey T. Howard, Peter B. Allen, Josh M. Wilken, and Jorge E. Bosch "Design and performance of a polysilicon surface micromachined microengine realized with arrays of asymmetrical electrothermal microactuators", Proc. SPIE 4407, MEMS Design, Fabrication, Characterization, and Packaging, (30 April 2001); https://doi.org/10.1117/12.425316

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