Optical methods for the measurement of MEMS materials and structures

Xiaoyuan He; Xin Kang; Chenggen Quan; Cho Jui Tay; Shihua Wang; Huai Min Shang

doi:10.1117/12.468778

29 May 2002 Optical methods for the measurement of MEMS materials and structures

Xiaoyuan He, Xin Kang, Chenggen Quan, Cho Jui Tay, Shihua Wang, Huai Min Shang

Proceedings Volume 4537, Third International Conference on Experimental Mechanics; (2002) https://doi.org/10.1117/12.468778
Event: Third International Conference on Experimental Mechanics, 2002, Beijing, China

Abstract

In this paper, optical methods for the surface profile and deformation measurement of MEMS materials and structures are introduced. The methods are based on the digital image correlation, interferometry and fringe projection. The deformations of a micro-mirror and a micro-beam are measured by phase shifting fringe projection and interferometry. The surface profile of an electrode pad was used for the demonstration of the microscopic surface contouring. For the MEMS material test, using a long working distance microscope and digital speckle correlation method the tensile strain of a thin copper wire is measured.

Citation Download Citation

Xiaoyuan He, Xin Kang, Chenggen Quan, Cho Jui Tay, Shihua Wang, and Huai Min Shang "Optical methods for the measurement of MEMS materials and structures", Proc. SPIE 4537, Third International Conference on Experimental Mechanics, (29 May 2002); https://doi.org/10.1117/12.468778

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