Development of optical MEMS CO2 sensors

Mark P. McNeal; Nicholas Moelders; Martin U. Pralle; Irina Puscasu; Lisa Last; William Ho; Anton C. Greenwald; James T. Daly; Edward A. Johnson; Thomas George

doi:10.1117/12.482316

5 September 2002 Development of optical MEMS CO₂ sensors

Mark P. McNeal, Nicholas Moelders, Martin U. Pralle, Irina Puscasu, Lisa Last, William Ho, Anton C. Greenwald, James T. Daly, Edward A. Johnson, Thomas George

Author Affiliations +

Proceedings Volume 4815, Atmospheric Radiation Measurements and Applications in Climate; (2002) https://doi.org/10.1117/12.482316
Event: International Symposium on Optical Science and Technology, 2002, Seattle, WA, United States

Abstract

Inexpensive optical MEMS gas and chemical sensors offer chip-level solutions to environmental monitoring, industrial health and safety, indoor air quality, and automobile exhaust emissions monitoring. Previously, Ion Optics, Inc. reported on a new design concept exploiting Si-based suspended micro-bridge structures. The devices are fabricated using conventional CMOS compatible processes. The use of photonic bandgap (PBG) crystals enables narrow band IR emission for high chemical selectivity and sensitivity. Spectral tuning was accomplished by controlling symmetry and lattice spacing of the PBG structures. IR spectroscopic studies were used to characterize transmission, absorption and emission spectra in the 2 to 20 micrometers wavelength range. Prototype designs explored suspension architectures and filament geometries. Device characterization studies measured drive and emission power, temperature uniformity, and black body detectivity. Gas detection was achieved using non-dispersive infrared (NDIR) spectroscopic techniques, whereby target gas species were determined from comparison to referenced spectra. A sensor system employing the emitter/detector sensor-chip with gas cell and reflective optics is demonstrated and CO₂ gas sensitivity limits are reported.

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Mark P. McNeal, Nicholas Moelders, Martin U. Pralle, Irina Puscasu, Lisa Last, William Ho, Anton C. Greenwald, James T. Daly, Edward A. Johnson, and Thomas George "Development of optical MEMS CO₂ sensors", Proc. SPIE 4815, Atmospheric Radiation Measurements and Applications in Climate, (5 September 2002); https://doi.org/10.1117/12.482316

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