Tapping force measurement using micromachined cantilevers and laser systems

Takeshi Hatsuzawa; Masanori Hayase; Toshiaki Oguchi

doi:10.1117/12.467331

18 October 2002 Tapping force measurement by using micromachined cantilevers and laser systems

Takeshi Hatsuzawa, Masanori Hayase, Toshiaki Oguchi

Proceedings Volume 4902, Optomechatronic Systems III; (2002) https://doi.org/10.1117/12.467331
Event: Optomechatronic Systems III, 2002, Stuttgart, Germany

Abstract

Measurement of periodical contact force of the tapping stylus is very important for performance evaluation of soft material profilometry. So far, simulations are perfomred to estimate the force, and force calibration cantilevers are used to measure small contact force of AFMs. Since the tappign stylus uses larger tappign force compared to AFMs, micro cantilevers made of glass are developed for the force measuremetn of range from mN to μN.The levers are calibrated by using a standard cantilever made of silicon,which is fabricated by a micromachining process. A laser interferometre system is used for the calibration of glass cantilever spring constant. A laser Doppler vibrometer is used to measure the velocity of the cantilevers, and the force is estimated from the velocity signal by an integration.

Citation Download Citation

Takeshi Hatsuzawa, Masanori Hayase, and Toshiaki Oguchi "Tapping force measurement by using micromachined cantilevers and laser systems", Proc. SPIE 4902, Optomechatronic Systems III, (18 October 2002); https://doi.org/10.1117/12.467331

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