Development of lithography technologies

Jiang Jun

doi:10.1117/12.481731

5 September 2002 Development of lithography technologies

Jiang Jun

Proceedings Volume 4921, Optical Manufacturing Technologies; (2002) https://doi.org/10.1117/12.481731
Event: Photonics Asia, 2002, Shanghai, China

Abstract

Optical manufacturing is very important to semiconductor, photonics and MEMS, and lithography is a core part of optical manufacturing. The development of lithography technologies, such as coating, exposure, resist and thick resist lithography, are mainly introduced.

Citation Download Citation

Jiang Jun "Development of lithography technologies", Proc. SPIE 4921, Optical Manufacturing Technologies, (5 September 2002); https://doi.org/10.1117/12.481731

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