Challenging micro-optical applications demand diverse manufacturing solutions

Gregg Borek; Peter Weissbrodt; Manfred Schrenk; Matthias Cumme

doi:10.1117/12.715022

7 March 2007 Challenging micro-optical applications demand diverse manufacturing solutions

Gregg Borek, Peter Weissbrodt, Manfred Schrenk, Matthias Cumme

Proceedings Volume 6462, Micromachining Technology for Micro-Optics and Nano-Optics V and Microfabrication Process Technology XII; 64620X (2007) https://doi.org/10.1117/12.715022
Event: MOEMS-MEMS 2007 Micro and Nanofabrication, 2007, San Jose, California, United States

Abstract

Many manufacturing techniques have been developed and implemented to fabricate a wide range of micro-optical products. The challenges of the micro-optics business are diverse and tend to resist a widely accepted manufacturing process such as has been implemented for CMOS fabrication. Many of the challenges that have been addressed with various solutions include optical waveband of operation from DUV through LWIR, material systems, cost of manufacturing for the intended application space, feature sizes based on device functionality, and fabrication technology based on the manufacturing volume. Some of the technologies to be discussed include device patterning by e-beam lithography, optical lithography, direct CNC machining and micro-polishing, and plastic replication.

Citation Download Citation

Gregg Borek, Peter Weissbrodt, Manfred Schrenk, and Matthias Cumme "Challenging micro-optical applications demand diverse manufacturing solutions", Proc. SPIE 6462, Micromachining Technology for Micro-Optics and Nano-Optics V and Microfabrication Process Technology XII, 64620X (7 March 2007); https://doi.org/10.1117/12.715022

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