Optimizing microfluidic ink delivery for dip pen nanolithography

Debjyoti Banerjee; Nabil A. Amro; Joe Fragala

doi:10.1117/12.524474

23 December 2003 Optimizing microfluidic ink delivery for dip pen nanolithography

Debjyoti Banerjee, Nabil A. Amro, Joe Fragala

Proceedings Volume 5345, Microfluidics, BioMEMS, and Medical Microsystems II; (2003) https://doi.org/10.1117/12.524474
Event: Micromachining and Microfabrication, 2004, San Jose, California, United States

Abstract

This work demonstrates the design optimization, fabrication process development, process optimization and testing of a microfluidic ink delivery apparatus (called "Inkwells") for simultaneously coating an array of DPN pens with different inks. The objective of this work is to deliver between 4 and 10 different inks from reservoirs into appropriately spacd microwell array. A tips of the multi-pen array are coated with different inks by dipping them into the microwell array. The reservoirs, microwells and their connecting micro-channels were etched in silicon wafers using Deep Reactive Ion Etching (DRIE). Fluid actuation was achieved by capillary wicking. The optimum layouts for different applications were selected with respect to the volume requirement of inks, the efficacy of ink-well filling, to obviate the problem of bubble formation, and to test the operations of dipping and writing with a parallel array of pens.

Citation Download Citation

Debjyoti Banerjee, Nabil A. Amro, and Joe Fragala "Optimizing microfluidic ink delivery for dip pen nanolithography", Proc. SPIE 5345, Microfluidics, BioMEMS, and Medical Microsystems II, (23 December 2003); https://doi.org/10.1117/12.524474

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available