A white-light profiling algorithm adopting the multiwavelength interferometric technique

Hua-Chen Hsu; Chi-Hong Tung; Ching-Fen Kao; Calvin C. Chang

doi:10.1117/12.559251

2 August 2004 A white-light profiling algorithm adopting the multiwavelength interferometric technique

Hua-Chen Hsu, Chi-Hong Tung, Ching-Fen Kao, Calvin C. Chang

Proceedings Volume 5531, Interferometry XII: Techniques and Analysis; (2004) https://doi.org/10.1117/12.559251
Event: Optical Science and Technology, the SPIE 49th Annual Meeting, 2004, Denver, Colorado, United States

Abstract

A new profiling algorithm is proposed for the scanning white-light interferometry. A series of white-light interferograms are acquired by traditional vertical scanning process. The collected intensity data of the interferograms are then Fourier-Transformed with respect to the ordinate, or the scanning axis, into the wave number domain, where two or more wave numbers are selected for further calculation. The multi-wavelength phase-unwrapping technique is then used to solve for the surface profile. Preliminary experiment has been carried out with a Mirau-type white-light interferometer on two sets of step-height standards. The proposed algorithm works as well even when the spectrum of the white-light source is not Gaussian distributed, while the conventional peak sensing algorithms do not.

Citation Download Citation

Hua-Chen Hsu, Chi-Hong Tung, Ching-Fen Kao, and Calvin C. Chang "A white-light profiling algorithm adopting the multiwavelength interferometric technique", Proc. SPIE 5531, Interferometry XII: Techniques and Analysis, (2 August 2004); https://doi.org/10.1117/12.559251

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available