On-site mixing and preparation of polyimide resists for reliable nanopatterning

Sucheta Gorwadkar; Taro Itatani; Masanori Komuro; Akinori Shiotani; Hiroshi Itatani

doi:10.1117/12.600178

4 May 2005 On-site mixing and preparation of polyimide resists for reliable nanopatterning

Sucheta Gorwadkar, Taro Itatani, Masanori Komuro, Akinori Shiotani, Hiroshi Itatani

Proceedings Volume 5753, Advances in Resist Technology and Processing XXII; (2005) https://doi.org/10.1117/12.600178
Event: Microlithography 2005, 2005, San Jose, California, United States

Abstract

Polyimides are attractive candidates in microelectronics due to their high thermal and chemical stability, low dielectric constants and high dry etching resistance. However, polyimides in solution form have tendency to absorb moisture, which could lead nonreproducibility in nanometer scale patterning. Since last 10 years, we have been developing a series of solvent soluble polyimides in powdered form, by using block-copolymerization process in the presence of binary catalyst. Here, we report our developed process for customized polyimide resist formulation and on-site resist preparation prior to any lithographic applications. The results of applications of on-site mixed and prepared polyimide resists for 435 nm, 365 nm, 248 nm and e-beam lithographies are summarized in this paper. The reproducibility of high resolution nanometer scale patterns by electron beam (e-beam) could observed even after five years, using the same stock of polyimide powder using the on-site mixing process. The results are given in this paper.

Citation Download Citation

Sucheta Gorwadkar, Taro Itatani, Masanori Komuro, Akinori Shiotani, and Hiroshi Itatani "On-site mixing and preparation of polyimide resists for reliable nanopatterning", Proc. SPIE 5753, Advances in Resist Technology and Processing XXII, (4 May 2005); https://doi.org/10.1117/12.600178

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