Dr. Taro Itatani Profile

Dr. Taro Itatani

Senior Researcher at AIST

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Publications (10)

Proceedings Article | 5 March 2022 Presentation + Paper

High-density passive multi-fiber assembly to single-mode polymer waveguides using embedded v-grooves for co-packaged optics

Tsuyoshi Aoki, Akihiro Noriki, Akio Ukita, Koichi Takemura, Isao Tamai, Yasuhiro Ibusuki, Taro Itatani, Satoshi Suda, Takayuki Kurosu, Fumi Nakamura, Daisuke Mizutani, Takeru Amano

Proceedings Volume 12007, 120070S (2022) https://doi.org/10.1117/12.2606344

KEYWORDS: Single mode fibers, Waveguides, Polymers, Optical testing, Silicon, Prototyping, Connectors, Fiber alignment equipment

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Proceedings Article | 26 September 2007 Paper

T-ray profile synthesis using photoconductive emitter array

Toshiaki Hattori, Masayoshi Masuda, Masaya Sakamoto, Kazuhiro Egawa, Taro Itatani, Akihiko Ohi

Proceedings Volume 6772, 67720J (2007) https://doi.org/10.1117/12.733615

KEYWORDS: Terahertz radiation, Antennas, Crystals, Diffraction, Real time imaging, Picosecond phenomena, Electrodes, Millimeter wave imaging, Super resolution, Polarization

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Proceedings Article | 4 May 2005 Paper

Block co-polymerized polyimide resists for KrF lithography and EB lithography with high dry etching resistance

Sucheta Gorwadkar, Taro Itatani, Hiroshi Itatani

Proceedings Volume 5753, (2005) https://doi.org/10.1117/12.600444

KEYWORDS: Etching, Dry etching, Lithography, Photoresist materials, Chlorine, Reactive ion etching, Silicon, Gallium arsenide, Resistance, Photomasks

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Proceedings Article | 4 May 2005 Paper

On-site mixing and preparation of polyimide resists for reliable nanopatterning

Sucheta Gorwadkar, Taro Itatani, Masanori Komuro, Akinori Shiotani, Hiroshi Itatani

Proceedings Volume 5753, (2005) https://doi.org/10.1117/12.600178

KEYWORDS: Photoresist materials, Electron beam lithography, Lithography, Nanostructures, Photoresist processing, Optical lithography, Water, Microelectronics, Scanning electron microscopy, Dielectrics

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Proceedings Article | 4 May 2005 Paper

Block-copolymerized polyimides for optical waveguides

Taro Itatani, Sucheta Gorwadkar, Akinori Shiotani, Masahiro Igusa, Kenji Yonei, Joji Maeda, Hiroshi Itatani

Proceedings Volume 5753, (2005) https://doi.org/10.1117/12.600190

KEYWORDS: Waveguides, Refractive index, Dispersion, Coating, Absorption, Dendrimers, Scanning electron microscopy, Nitrogen, Optical fibers, Single mode fibers

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Proceedings Article | 17 February 2003 Paper

Ultrafast photoconductive switches integrated with electrical waveguides of low-k polyimide

Shuichi Yagi, Taro Itatani, Hitoshi Kawanami, Sucheta Gorwadkar, Takayuki Uemura, Takafumi Fukushima, Hiroshi Itatani, Masao Tomoi, Munecazu Tacano

Proceedings Volume 4833, (2003) https://doi.org/10.1117/12.474331

KEYWORDS: Ultrafast phenomena, Switches, Waveguides, Titanium, Dielectrics, Gallium arsenide, Electro optics, Signal processing, Femtosecond phenomena, Capacitance

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Proceedings Article | 24 August 2001 Paper

Interlayer dielectric process for LSI circuits using positive photosensitive polyimide synthesized by block-copolymerization

Masahiro Aoyagi, Shigemasa Segawa, EunSil Jung, Taro Itatani, Masanori Komuro, Tsuenenori Sakamoto, Hiroshi Itatani, Masataka Miyamura, Shunichi Matsumoto

Proceedings Volume 4345, (2001) https://doi.org/10.1117/12.436832

KEYWORDS: Dielectrics, Silicon films, Semiconducting wafers, Capacitors, Capacitance, Silicon, Lithography, Heat treatments, Etching, Photomasks

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Proceedings Article | 23 June 2000 Paper

Positive photosensitive polyimide synthesized by block-copolymerization for KrF lithography

Taro Itatani, Sucheta Gorwadkar, Takafumi Fukushima, Masanori Komuro, Hiroshi Itatani, Masao Tomoi, Tsuenenori Sakamoto, Shunichi Matsumoto

Proceedings Volume 3999, (2000) https://doi.org/10.1117/12.388339

KEYWORDS: Lithography, Absorption, Silicon, Scanning electron microscopy, Reflectivity, Dielectrics, Aluminum, Reflection, Infrared radiation, Reactive ion etching

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Proceedings Article | 24 May 1999 Paper

Generation of THz electrical signals from nanostructures

Taro Itatani, Tadashi Nakagawa

Proceedings Volume 3624, (1999) https://doi.org/10.1117/12.349289

KEYWORDS: Terahertz radiation, Switches, Gallium arsenide, Superlattices, Ultrafast phenomena, Diodes, Titanium, Electro optics, Crystals, Absorption

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Proceedings Article | 8 July 1998 Paper

THz generation from photoconductive switches fabricated by using an atomic force microscope

Taro Itatani, Tadashi Nakagawa

Proceedings Volume 3269, (1998) https://doi.org/10.1117/12.312338

KEYWORDS: Switches, Terahertz radiation, Antennas, Crystals, Titanium, Atomic force microscope, Electro optics, Gallium arsenide, Ultrafast phenomena, Electrodes

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Showing 5 of 10 publications

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