Efficient topology and design methodology for RF MEMS switches

B. Ducarouge; D. Dubuc; S. Melle; K. Grenier; L. Mazenq; L. Bary; R. Plana

doi:10.1117/12.609396

1 July 2005 Efficient topology and design methodology for RF MEMS switches

B. Ducarouge, D. Dubuc, S. Melle, K. Grenier, L. Mazenq, L. Bary, R. Plana

Proceedings Volume 5836, Smart Sensors, Actuators, and MEMS II; (2005) https://doi.org/10.1117/12.609396
Event: Microtechnologies for the New Millennium 2005, 2005, Sevilla, Spain

Abstract

We present an original RF-MEMS switch topology associated with an efficient design methodology. The proposed switch has been optimized thank to a scalable electrical model, fabricated and measured and exhibits isolations better than -23 dB and losses less than 0.25 dB at 24 GHz for a pull down voltage of 22V. The proposed topology and design methodology can then be efficiently used to optimize more complex RF-MEMS with enhanced microwave performances.

Citation Download Citation

B. Ducarouge, D. Dubuc, S. Melle, K. Grenier, L. Mazenq, L. Bary, and R. Plana "Efficient topology and design methodology for RF MEMS switches", Proc. SPIE 5836, Smart Sensors, Actuators, and MEMS II, (1 July 2005); https://doi.org/10.1117/12.609396

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